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Namespace Prefixes

PrefixIRI
dctermshttp://purl.org/dc/terms/
n17http://linked.opendata.cz/resource/domain/vavai/riv/tvurce/
n12http://linked.opendata.cz/resource/domain/vavai/projekt/
n15http://linked.opendata.cz/ontology/domain/vavai/
n8http://linked.opendata.cz/resource/domain/vavai/zamer/
shttp://schema.org/
n5http://linked.opendata.cz/ontology/domain/vavai/riv/
skoshttp://www.w3.org/2004/02/skos/core#
n2http://linked.opendata.cz/resource/domain/vavai/vysledek/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
n18http://linked.opendata.cz/ontology/domain/vavai/riv/klicoveSlovo/
n16http://linked.opendata.cz/ontology/domain/vavai/riv/duvernostUdaju/
xsdhhttp://www.w3.org/2001/XMLSchema#
n11http://linked.opendata.cz/ontology/domain/vavai/riv/jazykVysledku/
n7http://linked.opendata.cz/ontology/domain/vavai/riv/aktivita/
n13http://linked.opendata.cz/ontology/domain/vavai/riv/obor/
n9http://linked.opendata.cz/ontology/domain/vavai/riv/druhVysledku/
n14http://linked.opendata.cz/resource/domain/vavai/vysledek/RIV%2F61388980%3A_____%2F09%3A00341419%21RIV10-MSM-61388980/
n6http://reference.data.gov.uk/id/gregorian-year/

Statements

Subject Item
n2:RIV%2F61388980%3A_____%2F09%3A00341419%21RIV10-MSM-61388980
rdf:type
n15:Vysledek skos:Concept
dcterms:description
Thin amorphous films of Ge-Sb-Te were deposited from Ge2Sb2Te5 target by RF (f=13.56 MHz) magnetron sputtering in argon plasma. Composition and chemical homogeneity of target and prepared thin films were traced by Energy Dispersive X-ray Analysis coupled with Scanning Electron Microscope (SEM-EDX). SEM technique was also used for surface morphology observation. Crystallinity of target and prepared thin films was studied by X-ray Diffraction (XRD). Optical parameters of prepared thin films (spectral dependence of refractive index, optical band gap energy E-g(opt)) and film thicknesses were established via Variable Angle Spectroscopic Ellipsometry (VASE) supported by UV-Vis-NIR spectroscopy. Influence of deposition conditions (RF power, At pressure, angle divergency from normal direction) to composition, crystallinity, optical properties and deposition rate was established. Thin amorphous films of Ge-Sb-Te were deposited from Ge2Sb2Te5 target by RF (f=13.56 MHz) magnetron sputtering in argon plasma. Composition and chemical homogeneity of target and prepared thin films were traced by Energy Dispersive X-ray Analysis coupled with Scanning Electron Microscope (SEM-EDX). SEM technique was also used for surface morphology observation. Crystallinity of target and prepared thin films was studied by X-ray Diffraction (XRD). Optical parameters of prepared thin films (spectral dependence of refractive index, optical band gap energy E-g(opt)) and film thicknesses were established via Variable Angle Spectroscopic Ellipsometry (VASE) supported by UV-Vis-NIR spectroscopy. Influence of deposition conditions (RF power, At pressure, angle divergency from normal direction) to composition, crystallinity, optical properties and deposition rate was established.
dcterms:title
On angle resolved RF magnetron sputtering of Ge-Sb-Te thin films On angle resolved RF magnetron sputtering of Ge-Sb-Te thin films
skos:prefLabel
On angle resolved RF magnetron sputtering of Ge-Sb-Te thin films On angle resolved RF magnetron sputtering of Ge-Sb-Te thin films
skos:notation
RIV/61388980:_____/09:00341419!RIV10-MSM-61388980
n5:aktivita
n7:Z n7:P
n5:aktivity
P(GA203/06/1368), P(LC523), Z(AV0Z40320502), Z(AV0Z40500505)
n5:cisloPeriodika
37-42
n5:dodaniDat
n6:2010
n5:domaciTvurceVysledku
n17:7933665
n5:druhVysledku
n9:J
n5:duvernostUdaju
n16:S
n5:entitaPredkladatele
n14:predkladatel
n5:idSjednocenehoVysledku
331330
n5:idVysledku
RIV/61388980:_____/09:00341419
n5:jazykVysledku
n11:eng
n5:klicovaSlova
amorphous semiconductors; films and coatings; sputtering
n5:klicoveSlovo
n18:films%20and%20coatings n18:sputtering n18:amorphous%20semiconductors
n5:kodStatuVydavatele
NL - Nizozemsko
n5:kontrolniKodProRIV
[8837BCBE38B0]
n5:nazevZdroje
Journal of Non-Crystalline Solids
n5:obor
n13:CA
n5:pocetDomacichTvurcuVysledku
1
n5:pocetTvurcuVysledku
6
n5:projekt
n12:GA203%2F06%2F1368 n12:LC523
n5:rokUplatneniVysledku
n6:2009
n5:svazekPeriodika
355
n5:tvurceVysledku
Hrdlička, M. Frumar, M. Wágner, T. Vlček, Milan Gutwirth, J. Bezdička, Petr
n5:wos
000270620900037
n5:zamer
n8:AV0Z40320502 n8:AV0Z40500505
s:issn
0022-3093
s:numberOfPages
4