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Statements

Subject Item
n2:RIV%2F60076658%3A12410%2F08%3A00009203%21RIV09-AV0-12410___
rdf:type
skos:Concept n15:Vysledek
dcterms:description
The paper presents systematic Langmuir probe diagnostic of a dc discharge in Ar/O-2 mixture with low fraction of O-2, burning in a sputtering planar magnetron. Electron density, electron temperature and plasma potential are investigated in dependence upon experimental conditions like pressure, rate of oxygen, incoming power, and on balanced or unbalanced mode of magnetron. A new method of determining negative-ion density from the current-voltage characteristic is proposed. This method is based on comparison of the characteristic measured in electronegative plasma (e.g. Ar/O-2) with a reference characteristic scanned in ail electropositive counterpart (Ar), existing in similar conditions. The paper presents systematic Langmuir probe diagnostic of a dc discharge in Ar/O-2 mixture with low fraction of O-2, burning in a sputtering planar magnetron. Electron density, electron temperature and plasma potential are investigated in dependence upon experimental conditions like pressure, rate of oxygen, incoming power, and on balanced or unbalanced mode of magnetron. A new method of determining negative-ion density from the current-voltage characteristic is proposed. This method is based on comparison of the characteristic measured in electronegative plasma (e.g. Ar/O-2) with a reference characteristic scanned in ail electropositive counterpart (Ar), existing in similar conditions. The paper presents systematic Langmuir probe diagnostic of a dc discharge in Ar/O-2 mixture with low fraction of O-2, burning in a sputtering planar magnetron. Electron density, electron temperature and plasma potential are investigated in dependence upon experimental conditions like pressure, rate of oxygen, incoming power, and on balanced or unbalanced mode of magnetron. A new method of determining negative-ion density from the current-voltage characteristic is proposed. This method is based on comparison of the characteristic measured in electronegative plasma (e.g. Ar/O-2) with a reference characteristic scanned in ail electropositive counterpart (Ar), existing in similar conditions.
dcterms:title
Study of electronegative Ar/O-2 discharge by means of Langmuir probe Study of electronegative Ar/O-2 discharge by means of Langmuir probe Study of electronegative Ar/O-2 discharge by means of Langmuir probe
skos:prefLabel
Study of electronegative Ar/O-2 discharge by means of Langmuir probe Study of electronegative Ar/O-2 discharge by means of Langmuir probe Study of electronegative Ar/O-2 discharge by means of Langmuir probe
skos:notation
RIV/60076658:12410/08:00009203!RIV09-AV0-12410___
n3:aktivita
n11:Z n11:P
n3:aktivity
P(KAN101120701), Z(MSM0021620834)
n3:cisloPeriodika
5-7
n3:dodaniDat
n13:2009
n3:domaciTvurceVysledku
n7:1510010 n7:2559390 n7:2989034 n7:9384065
n3:druhVysledku
n4:J
n3:duvernostUdaju
n9:S
n3:entitaPredkladatele
n12:predkladatel
n3:idSjednocenehoVysledku
398112
n3:idVysledku
RIV/60076658:12410/08:00009203
n3:jazykVysledku
n16:eng
n3:klicovaSlova
planar magnetron; probe diagnostics; electronegative plasma; electron density; negative ion density
n3:klicoveSlovo
n14:probe%20diagnostics n14:electron%20density n14:planar%20magnetron n14:electronegative%20plasma n14:negative%20ion%20density
n3:kodStatuVydavatele
DE - Spolková republika Německo
n3:kontrolniKodProRIV
[BA962E9C1DF6]
n3:nazevZdroje
Contribution to plasma physics
n3:obor
n19:BL
n3:pocetDomacichTvurcuVysledku
4
n3:pocetTvurcuVysledku
8
n3:projekt
n6:KAN101120701
n3:rokUplatneniVysledku
n13:2008
n3:svazekPeriodika
48
n3:tvurceVysledku
Hubička, Zdeněk Adámek, Petr Špatenka, Petr Straňák, Vítězslav Hippler, Reiner Tichý, Milan Wrehde, Joseph Blažek, Josef
n3:wos
000258126900020
n3:zamer
n18:MSM0021620834
s:issn
0863-1042
s:numberOfPages
6
n17:organizacniJednotka
12410