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Statements

Subject Item
n2:RIV%2F60076658%3A12410%2F08%3A00009199%21RIV09-AV0-12410___
rdf:type
n16:Vysledek skos:Concept
dcterms:description
V článku je prezentován 1D model elektrického výboje v nízkoteplotním argonovém plazmatu. Hybridní model sestává ze dvou částí ? částicového modelu, který simuluje rychlé elektrony a spojitého modelu simulujícího pomalé elektrony a ionty. V částicovém modelu jsou polohy a rychlosti částic určovány deterministicky Verletovo algoritmem, srážkové procesy jsou zavedeny stochastickými metodami. Rovnice spojitého modelu jsou řešeny pomocí Scharfetter-Gummelova exponenciálního schématu. Z výsledků je prezentován například celkový proud a napětí na rovinném substrátu, který je vložen do plazmatu. Dále jsou studovány iontové a elektronové vlny v okolí substrátu. An one-dimensional hybrid model of RF discharge in low-temperature argon plasma is presented in our paper. The hybrid model consists of two parts- particle model which simulate fast electrons while fluid model simulates slow electrons and positive argon ions. In the particle model the positions and velocities of fast electrons are calculated by mean of deterministic Verlet algorithm while the collision processes are treated by the stochastic way. For the solution of fluid equations, for slow electrons and positive argon ions, the Scharfetter-Gummel exponential algorithm was use. Typical results of our calculations presented in this paper are total RF current and RF voltage waveforms on the planar substrate immersed into argon plasma. The next results which can be found here are the ion, electron and displacement current waveforms on the substrate. An one-dimensional hybrid model of RF discharge in low-temperature argon plasma is presented in our paper. The hybrid model consists of two parts- particle model which simulate fast electrons while fluid model simulates slow electrons and positive argon ions. In the particle model the positions and velocities of fast electrons are calculated by mean of deterministic Verlet algorithm while the collision processes are treated by the stochastic way. For the solution of fluid equations, for slow electrons and positive argon ions, the Scharfetter-Gummel exponential algorithm was use. Typical results of our calculations presented in this paper are total RF current and RF voltage waveforms on the planar substrate immersed into argon plasma. The next results which can be found here are the ion, electron and displacement current waveforms on the substrate.
dcterms:title
Modelling of RF discharge in argon plasma Modelling of RF discharge in argon plasma Počítačové modelování RF výboje v argonovém plazmatu
skos:prefLabel
Modelling of RF discharge in argon plasma Modelling of RF discharge in argon plasma Počítačové modelování RF výboje v argonovém plazmatu
skos:notation
RIV/60076658:12410/08:00009199!RIV09-AV0-12410___
n3:aktivita
n9:P
n3:aktivity
P(KAN101120701)
n3:dodaniDat
n4:2009
n3:domaciTvurceVysledku
n10:3810909 n10:2047853
n3:druhVysledku
n11:D
n3:duvernostUdaju
n20:S
n3:entitaPredkladatele
n13:predkladatel
n3:idSjednocenehoVysledku
379983
n3:idVysledku
RIV/60076658:12410/08:00009199
n3:jazykVysledku
n15:eng
n3:klicovaSlova
Particle modelling; fluid modelling; hybrid modelling; argon plasma; RF plasma
n3:klicoveSlovo
n5:fluid%20modelling n5:RF%20plasma n5:hybrid%20modelling n5:Particle%20modelling n5:argon%20plasma
n3:kontrolniKodProRIV
[3E696F08C5DB]
n3:mistoVydani
Melville
n3:nazevZdroje
Computational Methods in Sciences and Engineering
n3:obor
n18:BK
n3:pocetDomacichTvurcuVysledku
2
n3:pocetTvurcuVysledku
4
n3:projekt
n19:KAN101120701
n3:rokUplatneniVysledku
n4:2008
n3:tvurceVysledku
Hubička, Z. Virostko, P. Jelínek, Petr Bartoš, Petr
s:numberOfPages
4
n7:hasPublisher
American Institute of Physics
n14:isbn
978-0-7354-0477-9
n17:organizacniJednotka
12410