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Statements

Subject Item
n2:RIV%2F60076658%3A12410%2F07%3A00008092%21RIV08-GA0-12410___
rdf:type
skos:Concept n19:Vysledek
dcterms:description
The contribution is focused on comparative diagnostics of deposited TiOx thin films created by different plasma sources under different experimental conditions. The TiOx layer were created from titanium isopropoxide vapours delivered into discharges zones of: (i) Ar/O2 surfatron discharge, working at microwave frequency 2.45 GHz, operated at reduced pressure and (ii) He/N2 pulsed RF driven barrier-torch discharge burning at open atmosphere. The layers were deposited on glass substrates and subsequently diagnosed by XRD before and also after thermal annealing and AFM measurements. The contribution is focused on comparative diagnostics of deposited TiOx thin films created by different plasma sources under different experimental conditions. The TiOx layer were created from titanium isopropoxide vapours delivered into discharges zones of: (i) Ar/O2 surfatron discharge, working at microwave frequency 2.45 GHz, operated at reduced pressure and (ii) He/N2 pulsed RF driven barrier-torch discharge burning at open atmosphere. The layers were deposited on glass substrates and subsequently diagnosed by XRD before and also after thermal annealing and AFM measurements. Práce přináší srovnávací studii TiO2 vrstev připravených mikrovlnným výbojem generovaným surfatronem ve směsí Ar-O2 a pulzním bariérovým výbojem generovaným ve směsi He-N2 za atmosférického tlaku. Byl studován vliv kalcinace na krystalovou strukturu vrstev.
dcterms:title
Deposition of thin TiOx layers using plasma sources of jet types Deposition of thin TiOx layers using plasma sources of jet types Depozice tenkých TiOx vrstev pomocí tryskových zdrojů plazmatu
skos:prefLabel
Deposition of thin TiOx layers using plasma sources of jet types Depozice tenkých TiOx vrstev pomocí tryskových zdrojů plazmatu Deposition of thin TiOx layers using plasma sources of jet types
skos:notation
RIV/60076658:12410/07:00008092!RIV08-GA0-12410___
n4:strany
139-140
n4:aktivita
n12:P
n4:aktivity
P(GA202/05/2242)
n4:dodaniDat
n20:2008
n4:domaciTvurceVysledku
n10:1276816 n10:2559390 n10:9384065
n4:druhVysledku
n15:D
n4:duvernostUdaju
n7:S
n4:entitaPredkladatele
n13:predkladatel
n4:idSjednocenehoVysledku
416250
n4:idVysledku
RIV/60076658:12410/07:00008092
n4:jazykVysledku
n17:eng
n4:klicovaSlova
TiOx; anatase; XRD; surfatron; RF nozzle
n4:klicoveSlovo
n5:anatase n5:TiOx n5:XRD n5:RF%20nozzle n5:surfatron
n4:kontrolniKodProRIV
[D37C19290D15]
n4:mistoVydani
Bratislava
n4:nazevZdroje
In: Matuška, J., Matějčík, S., Skalný, J.D. (ed.): Proceedings of SAPP XVI, 2007
n4:obor
n14:BL
n4:pocetDomacichTvurcuVysledku
3
n4:pocetTvurcuVysledku
7
n4:projekt
n18:GA202%2F05%2F2242
n4:rokUplatneniVysledku
n20:2007
n4:tvurceVysledku
Hubička, Z. Špatenka, Petr Straňák, Vítězslav Kment, S. Chichina, M. Churpita, O. Tichý, Milan
s:numberOfPages
2
n3:hasPublisher
Univerzita Komenského v Bratislave
n16:isbn
978-80-89186-13-6
n8:organizacniJednotka
12410