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Statements

Subject Item
n2:RIV%2F60076658%3A12410%2F03%3A00004608%21RIV%2F2004%2FMSM%2F124104%2FN
rdf:type
n14:Vysledek skos:Concept
dcterms:description
The diagnosed microwave plasma source consists of a surfatron powered by a microwave magnetron generator, which creates plasma from the flowing argon gas (at flow rate typically 600 sccm) in a quartz nozzle. We present first results of probe diagnostic of generated plasma at nozzle exit. The presented diagnostic includes the single and double probe measurements of the radial profile of the plasma-jet and its dependence on the axial position from the nozzle exit at argon pressure 4 kPa and microwave power 17 watts. In the future we plan to use the developed plasma source for material surface processing and possibly also in the area of biology and medicine. The diagnosed microwave plasma source consists of a surfatron powered by a microwave magnetron generator, which creates plasma from the flowing argon gas (at flow rate typically 600 sccm) in a quartz nozzle. We present first results of probe diagnostic of generated plasma at nozzle exit. The presented diagnostic includes the single and double probe measurements of the radial profile of the plasma-jet and its dependence on the axial position from the nozzle exit at argon pressure 4 kPa and microwave power 17 watts. In the future we plan to use the developed plasma source for material surface processing and possibly also in the area of biology and medicine.
dcterms:title
Electron temperature in surfatron-generated plasma-jet in argon measured by double Langmuir probe Electron temperature in surfatron-generated plasma-jet in argon measured by double Langmuir probe
skos:prefLabel
Electron temperature in surfatron-generated plasma-jet in argon measured by double Langmuir probe Electron temperature in surfatron-generated plasma-jet in argon measured by double Langmuir probe
skos:notation
RIV/60076658:12410/03:00004608!RIV/2004/MSM/124104/N
n3:strany
249-250
n3:aktivita
n13:Z
n3:aktivity
Z(MSM 124100004), Z(MSM 242100002)
n3:dodaniDat
n4:2004
n3:domaciTvurceVysledku
n9:1276816 n9:9384065 n9:2989034 n9:7057822 n9:2559390 n9:1510010
n3:druhVysledku
n7:D
n3:duvernostUdaju
n19:S
n3:entitaPredkladatele
n20:predkladatel
n3:idSjednocenehoVysledku
605677
n3:idVysledku
RIV/60076658:12410/03:00004608
n3:jazykVysledku
n6:eng
n3:klicovaSlova
electron temperature, electron density, double probe, single probe
n3:klicoveSlovo
n5:single%20probe n5:electron%20temperature n5:double%20probe n5:electron%20density
n3:kontrolniKodProRIV
[556D98EC8F01]
n3:mistoKonaniAkce
Greifswald
n3:mistoVydani
Greifswald
n3:nazevZdroje
In: Meichsner, J., Loffhagen, D., and Wagner, H. E. (Eds): Proceedings of the ICPIG XXVI Confererence
n3:obor
n10:BL
n3:pocetDomacichTvurcuVysledku
6
n3:pocetTvurcuVysledku
6
n3:pocetUcastnikuAkce
0
n3:pocetZahranicnichUcastnikuAkce
0
n3:rokUplatneniVysledku
n4:2003
n3:tvurceVysledku
Adámek, Petr Tichý, Milan Špatenka, Petr Straňák, Vítězslav Kříž, Pavel Blažek, Josef
n3:typAkce
n16:CST
n3:zahajeniAkce
2003-07-15+02:00
n3:zamer
n8:MSM%20124100004 n8:MSM%20242100002
s:numberOfPages
2
n18:hasPublisher
Universität Greifswald
n21:isbn
3-00-011689-3
n17:organizacniJednotka
12410