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Namespace Prefixes

PrefixIRI
dctermshttp://purl.org/dc/terms/
n7http://localhost/temp/predkladatel/
n15http://linked.opendata.cz/resource/domain/vavai/projekt/
n12http://linked.opendata.cz/resource/domain/vavai/riv/tvurce/
n5http://linked.opendata.cz/ontology/domain/vavai/
shttp://schema.org/
skoshttp://www.w3.org/2004/02/skos/core#
n3http://linked.opendata.cz/ontology/domain/vavai/riv/
n19http://bibframe.org/vocab/
n18http://linked.opendata.cz/resource/domain/vavai/vysledek/RIV%2F49777513%3A23640%2F14%3A43923317%21RIV15-MSM-23640___/
n2http://linked.opendata.cz/resource/domain/vavai/vysledek/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
n10http://linked.opendata.cz/ontology/domain/vavai/riv/klicoveSlovo/
n16http://linked.opendata.cz/ontology/domain/vavai/riv/duvernostUdaju/
xsdhhttp://www.w3.org/2001/XMLSchema#
n13http://linked.opendata.cz/ontology/domain/vavai/riv/aktivita/
n4http://linked.opendata.cz/ontology/domain/vavai/riv/jazykVysledku/
n14http://linked.opendata.cz/ontology/domain/vavai/riv/obor/
n9http://linked.opendata.cz/ontology/domain/vavai/riv/druhVysledku/
n11http://reference.data.gov.uk/id/gregorian-year/

Statements

Subject Item
n2:RIV%2F49777513%3A23640%2F14%3A43923317%21RIV15-MSM-23640___
rdf:type
n5:Vysledek skos:Concept
dcterms:description
We report the investigation of the formation phases of silicon nanostructures obtained from thermal annealing of hydrogenated amorphous silicon (a-Si:H)-based multilayers using in situ X-ray diffractometry, XRD. The multilayers composed of alternating layers of a-Si:H and silicon oxide were deposited on [100]-oriented crystalline silicon substrates using a plasma-enhanced chemical vapor deposition. Our results indicate that crystallization only starts after hydrogen effusion at a 500 °C annealing temperature, independent of the a-Si:H sublayer thickness. We report the investigation of the formation phases of silicon nanostructures obtained from thermal annealing of hydrogenated amorphous silicon (a-Si:H)-based multilayers using in situ X-ray diffractometry, XRD. The multilayers composed of alternating layers of a-Si:H and silicon oxide were deposited on [100]-oriented crystalline silicon substrates using a plasma-enhanced chemical vapor deposition. Our results indicate that crystallization only starts after hydrogen effusion at a 500 °C annealing temperature, independent of the a-Si:H sublayer thickness.
dcterms:title
Investigation of the transition phases from amorphous silicon-based multilayers to silicon nanostructures by in situ X-ray diffraction Investigation of the transition phases from amorphous silicon-based multilayers to silicon nanostructures by in situ X-ray diffraction
skos:prefLabel
Investigation of the transition phases from amorphous silicon-based multilayers to silicon nanostructures by in situ X-ray diffraction Investigation of the transition phases from amorphous silicon-based multilayers to silicon nanostructures by in situ X-ray diffraction
skos:notation
RIV/49777513:23640/14:43923317!RIV15-MSM-23640___
n3:aktivita
n13:P
n3:aktivity
P(ED2.1.00/03.0088)
n3:cisloPeriodika
7
n3:dodaniDat
n11:2015
n3:domaciTvurceVysledku
n12:6890075 n12:2378051 n12:1889788 n12:2891484 n12:8498989 n12:1072595
n3:druhVysledku
n9:J
n3:duvernostUdaju
n16:S
n3:entitaPredkladatele
n18:predkladatel
n3:idSjednocenehoVysledku
22774
n3:idVysledku
RIV/49777513:23640/14:43923317
n3:jazykVysledku
n4:eng
n3:klicovaSlova
X-ray diffraction; Raman spectroscopy; nanostructures; nanocrystalline silicon; multilayers; FTIR
n3:klicoveSlovo
n10:nanostructures n10:FTIR n10:X-ray%20diffraction n10:Raman%20spectroscopy n10:nanocrystalline%20silicon n10:multilayers
n3:kodStatuVydavatele
DE - Spolková republika Německo
n3:kontrolniKodProRIV
[321DEED29801]
n3:nazevZdroje
Physica Status Solidi A
n3:obor
n14:JJ
n3:pocetDomacichTvurcuVysledku
6
n3:pocetTvurcuVysledku
6
n3:projekt
n15:ED2.1.00%2F03.0088
n3:rokUplatneniVysledku
n11:2014
n3:svazekPeriodika
211
n3:tvurceVysledku
Calta, Pavel Prušáková, Lucie Netrvalová, Marie Agbo, Solomon Nwabueze Vavruňková, Veronika Šutta, Pavol
n3:wos
000339484000006
s:issn
1862-6300
s:numberOfPages
7
n19:doi
10.1002/pssa.201330231
n7:organizacniJednotka
23640