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Statements

Subject Item
n2:RIV%2F49777513%3A23640%2F11%3A43911858%21RIV12-MSM-23640___
rdf:type
skos:Concept n17:Vysledek
dcterms:description
Our previous investigations showed that nitrogen doping had a great impact on microstructure, electrical and optical properties of sputtered ZnO thin films. Aims of current research are to investigate the influence of nitrogen implantation and post-implantation annealing on physical properties of sputtered ZnO:Ga thin films and once more to attempt p-type doping. Our previous investigations showed that nitrogen doping had a great impact on microstructure, electrical and optical properties of sputtered ZnO thin films. Aims of current research are to investigate the influence of nitrogen implantation and post-implantation annealing on physical properties of sputtered ZnO:Ga thin films and once more to attempt p-type doping.
dcterms:title
Modification of physical properties of sputtered zinc oxide thin films by introduction of gallium and nitrogen Modification of physical properties of sputtered zinc oxide thin films by introduction of gallium and nitrogen
skos:prefLabel
Modification of physical properties of sputtered zinc oxide thin films by introduction of gallium and nitrogen Modification of physical properties of sputtered zinc oxide thin films by introduction of gallium and nitrogen
skos:notation
RIV/49777513:23640/11:43911858!RIV12-MSM-23640___
n17:predkladatel
n18:orjk%3A23640
n3:aktivita
n12:P
n3:aktivity
P(1M06031), P(ED2.1.00/03.0088)
n3:dodaniDat
n9:2012
n3:domaciTvurceVysledku
n8:8498989
n3:druhVysledku
n21:D
n3:duvernostUdaju
n6:S
n3:entitaPredkladatele
n13:predkladatel
n3:idSjednocenehoVysledku
213325
n3:idVysledku
RIV/49777513:23640/11:43911858
n3:jazykVysledku
n19:eng
n3:klicovaSlova
modification; thin film; ZnO:Ga:N
n3:klicoveSlovo
n15:thin%20film n15:ZnO%3AGa%3AN n15:modification
n3:kontrolniKodProRIV
[4807AAB368C5]
n3:mistoKonaniAkce
Spa Nový Smokovec, High Tatras, Slovakia
n3:mistoVydani
Žilina
n3:nazevZdroje
Proceedings of the 17th International Conference on Applied Physics of Condensed Matter
n3:obor
n11:BM
n3:pocetDomacichTvurcuVysledku
1
n3:pocetTvurcuVysledku
6
n3:projekt
n5:ED2.1.00%2F03.0088 n5:1M06031
n3:rokUplatneniVysledku
n9:2011
n3:tvurceVysledku
Tvarožek, Vladimír Novotný, Ivan Milosavljevič, M. Shtereva, Krasimira Flickyngerová, Soňa Šutta, Pavol
n3:typAkce
n10:WRD
n3:zahajeniAkce
2011-06-22+02:00
s:numberOfPages
4
n22:hasPublisher
Žilinská univerzita v Žiline
n16:isbn
978-80-554-0386-1
n20:organizacniJednotka
23640