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Namespace Prefixes

PrefixIRI
dctermshttp://purl.org/dc/terms/
n17http://localhost/temp/predkladatel/
n15http://linked.opendata.cz/resource/domain/vavai/projekt/
n13http://linked.opendata.cz/resource/domain/vavai/riv/tvurce/
n8http://linked.opendata.cz/ontology/domain/vavai/
shttp://schema.org/
skoshttp://www.w3.org/2004/02/skos/core#
n3http://linked.opendata.cz/ontology/domain/vavai/riv/
n2http://linked.opendata.cz/resource/domain/vavai/vysledek/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
n10http://linked.opendata.cz/resource/domain/vavai/vysledek/RIV%2F49777513%3A23640%2F08%3A00501248%21RIV11-MSM-23640___/
n14http://linked.opendata.cz/ontology/domain/vavai/riv/klicoveSlovo/
n18http://linked.opendata.cz/ontology/domain/vavai/riv/duvernostUdaju/
xsdhhttp://www.w3.org/2001/XMLSchema#
n11http://linked.opendata.cz/ontology/domain/vavai/riv/jazykVysledku/
n6http://linked.opendata.cz/ontology/domain/vavai/riv/aktivita/
n16http://linked.opendata.cz/ontology/domain/vavai/riv/obor/
n9http://linked.opendata.cz/ontology/domain/vavai/riv/druhVysledku/
n7http://reference.data.gov.uk/id/gregorian-year/

Statements

Subject Item
n2:RIV%2F49777513%3A23640%2F08%3A00501248%21RIV11-MSM-23640___
rdf:type
n8:Vysledek skos:Concept
dcterms:description
We report results obtained from FTIR and TEM measurements carried out on silicon thin films deposited by plasma-enhanced chemical vapor deposition (PECVD) from silane diluted with hydrogen. The hydrogen content, the microstructure factor, the mass density and the volume per Si-H vibrating dipoles were determined as a function of the hydrogen dilution. Hydrogen dilution of silane results in an inhomogeneous growth during which the material evolves from amorphous hydrogenated silicon (a-Si:H) to microcrystalline hydrogenated silicon (mc-Si:H). With increasing dilution the transition from amorphous to microcrystalline phase appears faster and the average mass density of the films decreases. The mc-Si:H films are mixed-phase void-rich materials with changing triphasic volume fractions of crystalline and amorphous phases and voids. Different bonding configurations of vibrating Si-H dipoles were observed in the a-Si:H and mc-Si:H. We report results obtained from FTIR and TEM measurements carried out on silicon thin films deposited by plasma-enhanced chemical vapor deposition (PECVD) from silane diluted with hydrogen. The hydrogen content, the microstructure factor, the mass density and the volume per Si-H vibrating dipoles were determined as a function of the hydrogen dilution. Hydrogen dilution of silane results in an inhomogeneous growth during which the material evolves from amorphous hydrogenated silicon (a-Si:H) to microcrystalline hydrogenated silicon (mc-Si:H). With increasing dilution the transition from amorphous to microcrystalline phase appears faster and the average mass density of the films decreases. The mc-Si:H films are mixed-phase void-rich materials with changing triphasic volume fractions of crystalline and amorphous phases and voids. Different bonding configurations of vibrating Si-H dipoles were observed in the a-Si:H and mc-Si:H.
dcterms:title
Microstructure of hydrogenated silicon thin films prepared from silane diluted with hydrogen Microstructure of hydrogenated silicon thin films prepared from silane diluted with hydrogen
skos:prefLabel
Microstructure of hydrogenated silicon thin films prepared from silane diluted with hydrogen Microstructure of hydrogenated silicon thin films prepared from silane diluted with hydrogen
skos:notation
RIV/49777513:23640/08:00501248!RIV11-MSM-23640___
n3:aktivita
n6:P
n3:aktivity
P(1M06031)
n3:cisloPeriodika
12
n3:dodaniDat
n7:2011
n3:domaciTvurceVysledku
n13:8498989
n3:druhVysledku
n9:J
n3:duvernostUdaju
n18:S
n3:entitaPredkladatele
n10:predkladatel
n3:idSjednocenehoVysledku
379356
n3:idVysledku
RIV/49777513:23640/08:00501248
n3:jazykVysledku
n11:eng
n3:klicovaSlova
thin-film silicon; amorphous phase; microcrystalline phase; hydrogen
n3:klicoveSlovo
n14:microcrystalline%20phase n14:amorphous%20phase n14:thin-film%20silicon n14:hydrogen
n3:kodStatuVydavatele
NL - Nizozemsko
n3:kontrolniKodProRIV
[953A7593137F]
n3:nazevZdroje
Applied Surface Science
n3:obor
n16:BM
n3:pocetDomacichTvurcuVysledku
1
n3:pocetTvurcuVysledku
5
n3:projekt
n15:1M06031
n3:rokUplatneniVysledku
n7:2008
n3:svazekPeriodika
254
n3:tvurceVysledku
Mikula, M. Van Elzakker, Gijs Müllerová, Jarmila Zeman, Miro Šutta, Pavol
n3:wos
000254243900015
s:issn
0169-4332
s:numberOfPages
6
n17:organizacniJednotka
23640