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Statements

Subject Item
n2:RIV%2F49777513%3A23520%2F13%3A43917535%21RIV14-MSM-23520___
rdf:type
skos:Concept n3:Vysledek
dcterms:description
Hard Zr-B-C-(N) films were deposited on Si(100) substrates by pulsed magnetron co-sputtering of a single boron carbide-zirconium target in various nitrogen-argon gas mixtures. The target was formed by a boron carbide plate overlapped by zirconium stripes which covered 15 or 45 % of the target erosion area. The nitrogen fractions in the gas mixture were in the range from 0 to 50 % at the total pressure of the gas mixture of 0.5 Pa. Hard (37 GPa) nanocrystalline Zr-B-C-N films with very low compressive stress (0.4 GPa) and high electrical conductivity (resistivity of 2.3 microohmmeter) were deposited in argon discharge at the 15 % Zr fraction in the target erosion area. Hard (37 GPa) nanocomposite Zr-B-C-N films with low compressive stress (0.6 GPa) and even higher electrical conductivity (resistivity of 1.7 microohmmeter) were deposited at the 45 % Zr fraction in the target erosion area and 5 % nitrogen fraction in the gas mixture. The former films exhibited very high oxidation resistance in air up to 650 Celsius degrees, while the latter to 550 Celsius degrees. Hard Zr-B-C-(N) films were deposited on Si(100) substrates by pulsed magnetron co-sputtering of a single boron carbide-zirconium target in various nitrogen-argon gas mixtures. The target was formed by a boron carbide plate overlapped by zirconium stripes which covered 15 or 45 % of the target erosion area. The nitrogen fractions in the gas mixture were in the range from 0 to 50 % at the total pressure of the gas mixture of 0.5 Pa. Hard (37 GPa) nanocrystalline Zr-B-C-N films with very low compressive stress (0.4 GPa) and high electrical conductivity (resistivity of 2.3 microohmmeter) were deposited in argon discharge at the 15 % Zr fraction in the target erosion area. Hard (37 GPa) nanocomposite Zr-B-C-N films with low compressive stress (0.6 GPa) and even higher electrical conductivity (resistivity of 1.7 microohmmeter) were deposited at the 45 % Zr fraction in the target erosion area and 5 % nitrogen fraction in the gas mixture. The former films exhibited very high oxidation resistance in air up to 650 Celsius degrees, while the latter to 550 Celsius degrees.
dcterms:title
Hard nanocrystalline Zr-B-C-N films with high electrical conductivity prepared by pulsed magnetron sputtering Hard nanocrystalline Zr-B-C-N films with high electrical conductivity prepared by pulsed magnetron sputtering
skos:prefLabel
Hard nanocrystalline Zr-B-C-N films with high electrical conductivity prepared by pulsed magnetron sputtering Hard nanocrystalline Zr-B-C-N films with high electrical conductivity prepared by pulsed magnetron sputtering
skos:notation
RIV/49777513:23520/13:43917535!RIV14-MSM-23520___
n3:predkladatel
n4:orjk%3A23520
n5:aktivita
n20:I n20:P
n5:aktivity
I, P(ED1.1.00/02.0090), P(OC10045)
n5:cisloPeriodika
1
n5:dodaniDat
n16:2014
n5:domaciTvurceVysledku
n10:9684328 n10:8632340 n10:8233152 n10:8341729 n10:3903230 n10:1975714
n5:druhVysledku
n19:J
n5:duvernostUdaju
n18:S
n5:entitaPredkladatele
n7:predkladatel
n5:idSjednocenehoVysledku
77049
n5:idVysledku
RIV/49777513:23520/13:43917535
n5:jazykVysledku
n11:eng
n5:klicovaSlova
Oxidation resistance; Pulsed magnetron sputtering; Electrical conductivity; Hardness; Nanocrystalline Zr-B-C-N films
n5:klicoveSlovo
n14:Hardness n14:Electrical%20conductivity n14:Oxidation%20resistance n14:Nanocrystalline%20Zr-B-C-N%20films n14:Pulsed%20magnetron%20sputtering
n5:kodStatuVydavatele
US - Spojené státy americké
n5:kontrolniKodProRIV
[26D5388698F8]
n5:nazevZdroje
Surface & Coatings Technology
n5:obor
n15:BL
n5:pocetDomacichTvurcuVysledku
6
n5:pocetTvurcuVysledku
7
n5:projekt
n12:OC10045 n12:ED1.1.00%2F02.0090
n5:rokUplatneniVysledku
n16:2013
n5:svazekPeriodika
215
n5:tvurceVysledku
Peřina, Vratislav Kohout, Jiří Prokšová, Šárka Vlček, Jaroslav Zeman, Petr Čerstvý, Radomír Steidl, Petr
n5:wos
000315659600027
s:issn
0257-8972
s:numberOfPages
6
n13:doi
10.1016/j.surfcoat.2012.08.084
n6:organizacniJednotka
23520