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Statements

Subject Item
n2:RIV%2F49777513%3A23520%2F12%3A43915258%21RIV13-GA0-23520___
rdf:type
skos:Concept n16:Vysledek
rdfs:seeAlso
http://www.sciencedirect.com/science/article/pii/S0257897212003222
dcterms:description
The article reports on dc pulsed reactive sputtering of two-phase single layer Al-O-N nanocomposite films using dual magnetron in a mixture of N2+O2 with pulsed inlet of oxygen. Two kinds of nanocomposite films weresputtered: (1) nc-AlN/a-(Al-O-N) film and (2) nc-(gamma-Al2O3)/a-(Al-O-N) nanocomposite film; here nc- and a- denotes the nanocrystalline and amorphous phase, respectively. The transition from the nc-AlN/a-(Al-O-N) nanocomposite to the nc-(gamma-Al2O3)/a-(Al-O-N) nanocomposite was controlled by the length of the period of oxygen pulses. It was found that both nanocomposites are highly elastic films with relatively high hardness H = 15 to 20 GPa, low effective Young's modulus E* satisfying the condition that the ratio H/E* } 0.1,high elastic recovery We } 60% and high resistance to cracking in bending. Correlations between the film structure and its mechanical properties are discussed in detail. The article reports on dc pulsed reactive sputtering of two-phase single layer Al-O-N nanocomposite films using dual magnetron in a mixture of N2+O2 with pulsed inlet of oxygen. Two kinds of nanocomposite films weresputtered: (1) nc-AlN/a-(Al-O-N) film and (2) nc-(gamma-Al2O3)/a-(Al-O-N) nanocomposite film; here nc- and a- denotes the nanocrystalline and amorphous phase, respectively. The transition from the nc-AlN/a-(Al-O-N) nanocomposite to the nc-(gamma-Al2O3)/a-(Al-O-N) nanocomposite was controlled by the length of the period of oxygen pulses. It was found that both nanocomposites are highly elastic films with relatively high hardness H = 15 to 20 GPa, low effective Young's modulus E* satisfying the condition that the ratio H/E* } 0.1,high elastic recovery We } 60% and high resistance to cracking in bending. Correlations between the film structure and its mechanical properties are discussed in detail.
dcterms:title
Two-phase single layer Al-O-N nanocomposite films with enhanced resistance to cracking Two-phase single layer Al-O-N nanocomposite films with enhanced resistance to cracking
skos:prefLabel
Two-phase single layer Al-O-N nanocomposite films with enhanced resistance to cracking Two-phase single layer Al-O-N nanocomposite films with enhanced resistance to cracking
skos:notation
RIV/49777513:23520/12:43915258!RIV13-GA0-23520___
n16:predkladatel
n17:orjk%3A23520
n4:aktivita
n7:P
n4:aktivity
P(GAP108/12/0393)
n4:cisloPeriodika
19-20
n4:dodaniDat
n13:2013
n4:domaciTvurceVysledku
n6:9684328 n6:5735459 n6:9269606 n6:2711796 n6:6370632
n4:druhVysledku
n10:J
n4:duvernostUdaju
n19:S
n4:entitaPredkladatele
n20:predkladatel
n4:idSjednocenehoVysledku
175505
n4:idVysledku
RIV/49777513:23520/12:43915258
n4:jazykVysledku
n9:eng
n4:klicovaSlova
Pulsed inlet of oxygen; Reactive sputtering; Mechanical properties; Al-based composites; Oxynitride; Two-phase nanocomposites
n4:klicoveSlovo
n11:Pulsed%20inlet%20of%20oxygen n11:Two-phase%20nanocomposites n11:Oxynitride n11:Al-based%20composites n11:Reactive%20sputtering n11:Mechanical%20properties
n4:kodStatuVydavatele
NL - Nizozemsko
n4:kontrolniKodProRIV
[B34069AE223A]
n4:nazevZdroje
Surface and Coatings Technology
n4:obor
n15:BL
n4:pocetDomacichTvurcuVysledku
5
n4:pocetTvurcuVysledku
5
n4:projekt
n21:GAP108%2F12%2F0393
n4:rokUplatneniVysledku
n13:2012
n4:svazekPeriodika
206
n4:tvurceVysledku
Musil, Jindřich Jílek, Richard Tölg, Tomáš Čerstvý, Radomír Meissner, Michal
n4:wos
000305662400056
s:issn
0257-8972
s:numberOfPages
5
n5:doi
10.1016/j.surfcoat.2012.04.028
n12:organizacniJednotka
23520