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Statements

Subject Item
n2:RIV%2F49777513%3A23520%2F11%3A43898486%21RIV12-MSM-23520___
rdf:type
n5:Vysledek skos:Concept
dcterms:description
We present a non-stationary model proposed for high power impulse magnetron sputtering discharges, which is based on a global description of the plasma processes. The model takes into account a typical structure of magnetron discharges by dividing the plasma volume into two zones, the magnetically confined high-density zone above the target racetrack and the bulk plasma zone, where the transport of particles onto the substrate and the chamber walls dominates. The comparisons of the calculated data with measured results for distinct experimental conditions in two different high power impulse magnetron sputtering systems show a good agreement, suggesting that all relevant plasma processes were correctly incorporated into the model equations. The model can be used to gain a more detailed insight into the complicated processes in such types of discharges and to predict the influence of various process parameters on the deposition characteristics. We present a non-stationary model proposed for high power impulse magnetron sputtering discharges, which is based on a global description of the plasma processes. The model takes into account a typical structure of magnetron discharges by dividing the plasma volume into two zones, the magnetically confined high-density zone above the target racetrack and the bulk plasma zone, where the transport of particles onto the substrate and the chamber walls dominates. The comparisons of the calculated data with measured results for distinct experimental conditions in two different high power impulse magnetron sputtering systems show a good agreement, suggesting that all relevant plasma processes were correctly incorporated into the model equations. The model can be used to gain a more detailed insight into the complicated processes in such types of discharges and to predict the influence of various process parameters on the deposition characteristics.
dcterms:title
A non-stationary model for high power impulse magnetron sputtering discharges A non-stationary model for high power impulse magnetron sputtering discharges
skos:prefLabel
A non-stationary model for high power impulse magnetron sputtering discharges A non-stationary model for high power impulse magnetron sputtering discharges
skos:notation
RIV/49777513:23520/11:43898486!RIV12-MSM-23520___
n5:predkladatel
n6:orjk%3A23520
n3:aktivita
n13:P n13:Z
n3:aktivity
P(OC10045), Z(MSM4977751302)
n3:cisloPeriodika
110
n3:dodaniDat
n17:2012
n3:domaciTvurceVysledku
n11:5255252 n11:7741715
n3:druhVysledku
n9:J
n3:duvernostUdaju
n19:S
n3:entitaPredkladatele
n20:predkladatel
n3:idSjednocenehoVysledku
183990
n3:idVysledku
RIV/49777513:23520/11:43898486
n3:jazykVysledku
n8:eng
n3:klicovaSlova
Global plasma model; Non-stationary model; HiPIMS; Pulsed sputtering; High-power magnetron sputtering
n3:klicoveSlovo
n4:High-power%20magnetron%20sputtering n4:Non-stationary%20model n4:HiPIMS n4:Pulsed%20sputtering n4:Global%20plasma%20model
n3:kodStatuVydavatele
US - Spojené státy americké
n3:kontrolniKodProRIV
[41AD3EA98550]
n3:nazevZdroje
Journal of Applied Physics
n3:obor
n18:BL
n3:pocetDomacichTvurcuVysledku
2
n3:pocetTvurcuVysledku
2
n3:projekt
n21:OC10045
n3:rokUplatneniVysledku
n17:2011
n3:svazekPeriodika
2011
n3:tvurceVysledku
Kozák, Tomáš Pajdarová, Andrea Dag
n3:zamer
n12:MSM4977751302
s:issn
0021-8979
s:numberOfPages
11
n15:doi
10.1063/1.3656446
n16:organizacniJednotka
23520