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Statements

Subject Item
n2:RIV%2F49777513%3A23520%2F07%3A00000335%21RIV08-MSM-23520___
rdf:type
n8:Vysledek skos:Concept
dcterms:description
Studie se věnuje nové skupině amorfních nanokompozitních povlaků a-Si3N4/MeNx s vysokým (>50 obj.%) obsahem fáze Si3N4 (Me=Zr, Ta, Mo a W). Tyto nanokompozity vykazují vysokou (>1000°C) teplotní stabilitu zabraňující krystalizaci a vysokou (>1000°C) oxidační odolnost v případě, že je kov Me zabudovaný do nanokompozitu vhodně zvolený. Bylo zjištěno, že vrstva Zr-Si-N deponovaná na substrát Si(100) nevykazuje žádný nárůst hmotnosti (Δm=0) během termogravimetrického měření provedeného v tekoucím vzduchu až do teploty 1300°C, tj. až do teplotního limitu substrátu Si, což není teplotní limit nanokompozitu. This article reports on a new class of amorphous a-Si3N4/MeNx nanocomposite coatings with a high content of Si3N4 phase; here Me=Zr, Ta, Mo and W. These nanocomposites exhibit high thermal stability against crystallization and high oxidation resistance if the metal Me incorporated in the nanocomposite is correctly selected. It was found that the Zr-Si-N film deposited on Si substrate exhibits no increase of the mass in thermogravimetric measurements performed in flowing air up to 1300°C, i.e. up to the temperature that is the thermal limit for Si substrate but not for nanocomposite. This article reports on a new class of amorphous a-Si3N4/MeNx nanocomposite coatings with a high content of Si3N4 phase; here Me=Zr, Ta, Mo and W. These nanocomposites exhibit high thermal stability against crystallization and high oxidation resistance if the metal Me incorporated in the nanocomposite is correctly selected. It was found that the Zr-Si-N film deposited on Si substrate exhibits no increase of the mass in thermogravimetric measurements performed in flowing air up to 1300°C, i.e. up to the temperature that is the thermal limit for Si substrate but not for nanocomposite.
dcterms:title
Tvrdé nanokompozitní povlaky a-Si3N4/MeNx s vysokou teplotní stabilitou a oxidační odolností Hard a-Si3N4/MeNx nanocomposite coatings with high thermal stability and high oxidation resistance Hard a-Si3N4/MeNx nanocomposite coatings with high thermal stability and high oxidation resistance
skos:prefLabel
Hard a-Si3N4/MeNx nanocomposite coatings with high thermal stability and high oxidation resistance Tvrdé nanokompozitní povlaky a-Si3N4/MeNx s vysokou teplotní stabilitou a oxidační odolností Hard a-Si3N4/MeNx nanocomposite coatings with high thermal stability and high oxidation resistance
skos:notation
RIV/49777513:23520/07:00000335!RIV08-MSM-23520___
n3:strany
31
n3:aktivita
n5:Z
n3:aktivity
Z(MSM4977751302)
n3:cisloPeriodika
0
n3:dodaniDat
n13:2008
n3:domaciTvurceVysledku
n14:8233152 n14:9269606
n3:druhVysledku
n10:J
n3:duvernostUdaju
n4:S
n3:entitaPredkladatele
n6:predkladatel
n3:idSjednocenehoVysledku
423806
n3:idVysledku
RIV/49777513:23520/07:00000335
n3:jazykVysledku
n17:eng
n3:klicovaSlova
a-Si3N4/MeNx composites; structure; surface morphology; mechanical properties; oxidation resistance; DC reactive magnetron sputtering
n3:klicoveSlovo
n12:surface%20morphology n12:oxidation%20resistance n12:structure n12:a-Si3N4%2FMeNx%20composites n12:DC%20reactive%20magnetron%20sputtering n12:mechanical%20properties
n3:kodStatuVydavatele
CH - Švýcarská konfederace
n3:kontrolniKodProRIV
[DDB50629CA99]
n3:nazevZdroje
Solid State Phenomena
n3:obor
n9:BL
n3:pocetDomacichTvurcuVysledku
2
n3:pocetTvurcuVysledku
2
n3:rokUplatneniVysledku
n13:2007
n3:tvurceVysledku
Zeman, Petr Musil, Jindřich
n3:zamer
n15:MSM4977751302
s:issn
1012-0394
s:numberOfPages
6
n18:organizacniJednotka
23520