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Statements

Subject Item
n2:RIV%2F49777513%3A23520%2F04%3A00000267%21RIV%2F2005%2FMSM%2F235205%2FN
rdf:type
n6:Vysledek skos:Concept
dcterms:description
Byl zkoumán vliv energie, dodávané do Ti(Fe)Nx vrstev během jejich růstu dopadajícími ionty na jejich fyzikální a mechanické vlastnosti. This article reports on results of systematic investigation of properties of hard Ti(Fe)Nx films reactively sputtered using a d.c. unbalanced magnetron. The Ti(Fe)Nx films with a low Fe content were selected as typical single-phase material to investigat This article reports on results of systematic investigation of properties of hard Ti(Fe)Nx films reactively sputtered using a d.c. unbalanced magnetron. The Ti(Fe)Nx films with a low Fe content were selected as typical single-phase material to investigat
dcterms:title
Vliv energie iontů na vlastnosti tvrdých, reaktivně naprašovaných Ti(Fe)Nx vrstev Effect of ion bombardment on properties of hard reactively sputtered Ti(Fe)Nx films Effect of ion bombardment on properties of hard reactively sputtered Ti(Fe)Nx films
skos:prefLabel
Vliv energie iontů na vlastnosti tvrdých, reaktivně naprašovaných Ti(Fe)Nx vrstev Effect of ion bombardment on properties of hard reactively sputtered Ti(Fe)Nx films Effect of ion bombardment on properties of hard reactively sputtered Ti(Fe)Nx films
skos:notation
RIV/49777513:23520/04:00000267!RIV/2005/MSM/235205/N
n3:strany
289-298
n3:aktivita
n16:Z n16:P
n3:aktivity
P(ME 529), Z(MSM 235200002)
n3:cisloPeriodika
0
n3:dodaniDat
n14:2005
n3:domaciTvurceVysledku
n4:9269606 n4:6182607 n4:1975714 n4:7084617
n3:druhVysledku
n18:J
n3:duvernostUdaju
n15:S
n3:entitaPredkladatele
n11:predkladatel
n3:idSjednocenehoVysledku
561934
n3:idVysledku
RIV/49777513:23520/04:00000267
n3:jazykVysledku
n9:eng
n3:klicovaSlova
Ti(Fe)Nx; single-phase films; reactive magnetron sputtering; ion bombardment; physical and mechanical properties; enhanced hardness
n3:klicoveSlovo
n10:single-phase%20films n10:enhanced%20hardness n10:physical%20and%20mechanical%20properties n10:reactive%20magnetron%20sputtering n10:Ti%28Fe%29Nx n10:ion%20bombardment
n3:kodStatuVydavatele
NL - Nizozemsko
n3:kontrolniKodProRIV
[7AB0AE5DD2B5]
n3:nazevZdroje
Surface and Coatings Technology
n3:obor
n17:BL
n3:pocetDomacichTvurcuVysledku
4
n3:pocetTvurcuVysledku
4
n3:projekt
n19:ME%20529
n3:rokUplatneniVysledku
n14:2004
n3:svazekPeriodika
177-178
n3:tvurceVysledku
Poláková, Helena Vlček, Jaroslav Musil, Jindřich Šůna, Jan
n3:zamer
n13:MSM%20235200002
s:issn
0257-8972
s:numberOfPages
10
n12:organizacniJednotka
23520