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Statements

Subject Item
n2:RIV%2F49777513%3A23210%2F10%3A00503819%21RIV11-GA0-23210___
rdf:type
n11:Vysledek skos:Concept
dcterms:description
Ultrananocrystalline diamodn (UNCD) films were deposited directly on polished silicon substrates in microwave discharge (2.45 GHz) combined with rf caparitive plasma (13.56 MHz) ingnited at the substrate electrode. The latter procedure resulted in the deposition of coating with the hardness of 70 GPa and very good fracture toughness. The analyses of optical measurement in UV-IR range confirmed the presence of 250 nm thick intermediate layer containing diamond like carbon and SiC materials. Ultrananocrystalline diamodn (UNCD) films were deposited directly on polished silicon substrates in microwave discharge (2.45 GHz) combined with rf caparitive plasma (13.56 MHz) ingnited at the substrate electrode. The latter procedure resulted in the deposition of coating with the hardness of 70 GPa and very good fracture toughness. The analyses of optical measurement in UV-IR range confirmed the presence of 250 nm thick intermediate layer containing diamond like carbon and SiC materials.
dcterms:title
Optical and mechanical characterization of ultrananocrystalline diamond films prepared in dual frequency discharges Optical and mechanical characterization of ultrananocrystalline diamond films prepared in dual frequency discharges
skos:prefLabel
Optical and mechanical characterization of ultrananocrystalline diamond films prepared in dual frequency discharges Optical and mechanical characterization of ultrananocrystalline diamond films prepared in dual frequency discharges
skos:notation
RIV/49777513:23210/10:00503819!RIV11-GA0-23210___
n7:aktivita
n15:Z n15:P
n7:aktivity
P(GA106/09/0125), P(GA202/07/1669), P(KAN311610701), Z(MSM0021622411)
n7:cisloPeriodika
12-13
n7:dodaniDat
n13:2011
n7:domaciTvurceVysledku
n14:4308743
n7:druhVysledku
n16:J
n7:duvernostUdaju
n12:S
n7:entitaPredkladatele
n19:predkladatel
n7:idSjednocenehoVysledku
277141
n7:idVysledku
RIV/49777513:23210/10:00503819
n7:jazykVysledku
n17:eng
n7:klicovaSlova
Ultrananocrystalline diamond; microwave discharge; hardness; fracture toughness
n7:klicoveSlovo
n8:Ultrananocrystalline%20diamond n8:fracture%20toughness n8:hardness n8:microwave%20discharge
n7:kodStatuVydavatele
CH - Švýcarská konfederace
n7:kontrolniKodProRIV
[186CCD9B4E13]
n7:nazevZdroje
Surface & Coatings Technology
n7:obor
n18:JJ
n7:pocetDomacichTvurcuVysledku
1
n7:pocetTvurcuVysledku
7
n7:projekt
n10:GA106%2F09%2F0125 n10:KAN311610701 n10:GA202%2F07%2F1669
n7:rokUplatneniVysledku
n13:2010
n7:svazekPeriodika
204
n7:tvurceVysledku
Nečas, David Buršíková, Vilma Zajíčková, Lenka Šperka, Jiří Franta, Daniel Karásková, Monika Bláhová, Olga
n7:zamer
n9:MSM0021622411
s:issn
0257-8972
s:numberOfPages
5
n5:organizacniJednotka
23210