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Statements

Subject Item
n2:RIV%2F44555601%3A13430%2F00%3A00000566%21RIV%2F2001%2FMSM%2F134301%2FN
rdf:type
skos:Concept n17:Vysledek
dcterms:description
The application of the chromatic sensing for monitoring of a microwave plasma source is described. The emitted radiation from the plasma excited in the argon, oxygen and CF4 mixture was measured with three PIN - diodes with integrated optical filters. The response of the chromatics signals on variation of the power and gas composition was investigated. Whereas a good sensitivity of the integrated optical signal to the power was confirmed, only a limited sensitivity to the working gas mixture was found. The application of the chromatic sensing for monitoring of a microwave plasma source is described. The emitted radiation from the plasma excited in the argon, oxygen and CF4 mixture was measured with three PIN - diodes with integrated optical filters. The response of the chromatics signals on variation of the power and gas composition was investigated. Whereas a good sensitivity of the integrated optical signal to the power was confirmed, only a limited sensitivity to the working gas mixture was found.
dcterms:title
Chromatic Monitoring of DownstreamMicrowave Plasma Source Chromatic Monitoring of DownstreamMicrowave Plasma Source
skos:prefLabel
Chromatic Monitoring of DownstreamMicrowave Plasma Source Chromatic Monitoring of DownstreamMicrowave Plasma Source
skos:notation
RIV/44555601:13430/00:00000566!RIV/2001/MSM/134301/N
n3:strany
481
n3:aktivita
n10:Z n10:P
n3:aktivity
P(OC 527.50), P(OK 401), Z(MSM 124100004), Z(MSM 134300001), Z(MSM 242100002)
n3:cisloPeriodika
8
n3:dodaniDat
n9:2001
n3:domaciTvurceVysledku
Pavlík, Jaroslav
n3:druhVysledku
n16:J
n3:duvernostUdaju
n13:S
n3:entitaPredkladatele
n14:predkladatel
n3:idSjednocenehoVysledku
706790
n3:idVysledku
RIV/44555601:13430/00:00000566
n3:jazykVysledku
n4:eng
n3:kontrolniKodProRIV
[816B53250A2D]
n3:nazevZdroje
Czechoslovak Journal of Physics
n3:obor
n7:BL
n3:pocetDomacichTvurcuVysledku
1
n3:pocetTvurcuVysledku
4
n3:projekt
n12:OK%20401 n12:OC%20527.50
n3:rokUplatneniVysledku
n9:2000
n3:svazekPeriodika
50
n3:tvurceVysledku
Špatenka, P. Šerý, M. Messelhäuser, J. Pavlík, Jaroslav
n3:zamer
n11:MSM%20134300001 n11:MSM%20242100002 n11:MSM%20124100004
s:issn
0011-4626
s:numberOfPages
6
n8:organizacniJednotka
13430