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Statements

Subject Item
n2:RIV%2F00216305%3A26310%2F13%3APU105705%21RIV14-MPO-26310___
rdf:type
n15:Vysledek skos:Concept
dcterms:description
This paper compares Chromatic White Light (CWL) and stylus profilometer measurements in an attempt to determine the capabilities of the non-contact CWL method for thickness measurements of thin soft organic films. It was found that the CWL technique is proper for a measurement of thin soft organic films with higher than 40-50 nm film thicknesses. As a complementary feature of the method 2D and 3D surface morphology imaging of the films were recorded and processed by digital calculations and Fourier filtering. This paper compares Chromatic White Light (CWL) and stylus profilometer measurements in an attempt to determine the capabilities of the non-contact CWL method for thickness measurements of thin soft organic films. It was found that the CWL technique is proper for a measurement of thin soft organic films with higher than 40-50 nm film thicknesses. As a complementary feature of the method 2D and 3D surface morphology imaging of the films were recorded and processed by digital calculations and Fourier filtering.
dcterms:title
Film Thickness Measurement and Surface Characterization by Optical Profilometer MicroProf FRT Film Thickness Measurement and Surface Characterization by Optical Profilometer MicroProf FRT
skos:prefLabel
Film Thickness Measurement and Surface Characterization by Optical Profilometer MicroProf FRT Film Thickness Measurement and Surface Characterization by Optical Profilometer MicroProf FRT
skos:notation
RIV/00216305:26310/13:PU105705!RIV14-MPO-26310___
n15:predkladatel
n16:orjk%3A26310
n3:aktivita
n18:P
n3:aktivity
P(FR-TI1/144), P(GAP205/10/2280)
n3:dodaniDat
n10:2014
n3:domaciTvurceVysledku
Mladenova, Daniela Siderov, Vasil Zhivkov, Ivaylo n9:8845263 n9:2794187 n9:6615007 Milenkov, Viktor
n3:druhVysledku
n12:O
n3:duvernostUdaju
n4:S
n3:entitaPredkladatele
n17:predkladatel
n3:idSjednocenehoVysledku
74966
n3:idVysledku
RIV/00216305:26310/13:PU105705
n3:jazykVysledku
n11:eng
n3:klicovaSlova
Chromatic White Light, Thin Soft Organic Films, Film Thickness Measurement
n3:klicoveSlovo
n7:Thin%20Soft%20Organic%20Films n7:Chromatic%20White%20Light n7:Film%20Thickness%20Measurement
n3:kontrolniKodProRIV
[83D71ED502F2]
n3:obor
n8:CF
n3:pocetDomacichTvurcuVysledku
7
n3:pocetTvurcuVysledku
8
n3:projekt
n5:FR-TI1%2F144 n5:GAP205%2F10%2F2280
n3:rokUplatneniVysledku
n10:2013
n3:tvurceVysledku
Ohlídal, Miloslav Salyk, Ota Weiter, Martin Milenkov, Viktor Mladenova, Daniela Zhivkov, Ivaylo Siderov, Vasil
n14:organizacniJednotka
26310