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Statements

Subject Item
n2:RIV%2F00216305%3A26310%2F12%3APU105242%21RIV14-MK0-26310___
rdf:type
n18:Vysledek skos:Concept
dcterms:description
This work focuses on high density thin films deposited by PECVD using hexamethyldisiloxane precursor. Optical emission spectroscopy was used for plasma diagnostics. Oxygen transmission rate and infrared spectra of deposited layers were measured. Optimal experimental conditions for low carbon content layers and layers with good barrier properties were determined. This work focuses on high density thin films deposited by PECVD using hexamethyldisiloxane precursor. Optical emission spectroscopy was used for plasma diagnostics. Oxygen transmission rate and infrared spectra of deposited layers were measured. Optimal experimental conditions for low carbon content layers and layers with good barrier properties were determined.
dcterms:title
Plasma Enhanced Chemical Vapour Deposition of SiO2-Like Films: Monitoring and Optimization of the Process Plasma Enhanced Chemical Vapour Deposition of SiO2-Like Films: Monitoring and Optimization of the Process
skos:prefLabel
Plasma Enhanced Chemical Vapour Deposition of SiO2-Like Films: Monitoring and Optimization of the Process Plasma Enhanced Chemical Vapour Deposition of SiO2-Like Films: Monitoring and Optimization of the Process
skos:notation
RIV/00216305:26310/12:PU105242!RIV14-MK0-26310___
n18:predkladatel
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n3:aktivita
n13:P
n3:aktivity
P(DF11P01OVV004)
n3:dodaniDat
n17:2014
n3:domaciTvurceVysledku
n9:8194041 n9:9496513 n9:2888165 n9:7294697
n3:druhVysledku
n20:D
n3:duvernostUdaju
n15:S
n3:entitaPredkladatele
n19:predkladatel
n3:idSjednocenehoVysledku
158855
n3:idVysledku
RIV/00216305:26310/12:PU105242
n3:jazykVysledku
n4:eng
n3:klicovaSlova
Thin film deposition, optical emission spectroscopy, oxygen transmission rate
n3:klicoveSlovo
n5:Thin%20film%20deposition n5:oxygen%20transmission%20rate n5:optical%20emission%20spectroscopy
n3:kontrolniKodProRIV
[E4C78E7A32A8]
n3:mistoKonaniAkce
Brno
n3:mistoVydani
Brno
n3:nazevZdroje
Studentská odborná konference Chemie je život 2012, Sborník příspěvků
n3:obor
n16:AC
n3:pocetDomacichTvurcuVysledku
4
n3:pocetTvurcuVysledku
4
n3:projekt
n6:DF11P01OVV004
n3:rokUplatneniVysledku
n17:2012
n3:tvurceVysledku
Krčma, František Procházka, Michal Blahová, Lucie Přikryl, Radek
n3:typAkce
n8:EUR
n3:zahajeniAkce
2012-12-07+01:00
s:numberOfPages
4
n14:hasPublisher
Vysoké učení technické v Brně. Fakulta chemická
n7:isbn
978-80-214-4644-1
n10:organizacniJednotka
26310