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Statements

Subject Item
n2:RIV%2F00216305%3A26310%2F12%3APU100117%21RIV15-MSM-26310___
rdf:type
skos:Concept n6:Vysledek
dcterms:description
This paper compares chromatic white light (CWL) and interference microscope measurements aiming to find a proper non-contact method for a thickness determination of thin soft organic films. Standard samples with vacuum deposited aluminum films of different thicknesses in the range of 50-1000 nm were prepared and measured by both methods. It was found that the CWL technique is proper for a measurement of thin soft organic films with higher than 40-50 nm film thicknesses. As a complementary feature of the method 2D and 3D surface morphology imaging of the films could be recorded and the surface film roughness could be calculated. In a case of optical inhomogeneity the method requires covering with a uniform high reflective coating. The interference microscopy method results in a relatively lower film thickness with a higher standard deviation and a higher standard relative error. It could be connected with the resolution of the interferograms measured. This paper compares chromatic white light (CWL) and interference microscope measurements aiming to find a proper non-contact method for a thickness determination of thin soft organic films. Standard samples with vacuum deposited aluminum films of different thicknesses in the range of 50-1000 nm were prepared and measured by both methods. It was found that the CWL technique is proper for a measurement of thin soft organic films with higher than 40-50 nm film thicknesses. As a complementary feature of the method 2D and 3D surface morphology imaging of the films could be recorded and the surface film roughness could be calculated. In a case of optical inhomogeneity the method requires covering with a uniform high reflective coating. The interference microscopy method results in a relatively lower film thickness with a higher standard deviation and a higher standard relative error. It could be connected with the resolution of the interferograms measured.
dcterms:title
Thickness measurement of thin soft organic films Thickness measurement of thin soft organic films
skos:prefLabel
Thickness measurement of thin soft organic films Thickness measurement of thin soft organic films
skos:notation
RIV/00216305:26310/12:PU100117!RIV15-MSM-26310___
n4:aktivita
n15:O n15:P
n4:aktivity
O, P(ED0012/01/01)
n4:dodaniDat
n11:2015
n4:domaciTvurceVysledku
Siderov, Vasil n14:2794187 n14:8845263 Zhivkov, Ivaylo Mladenova, Daniela n14:6615007
n4:druhVysledku
n13:O
n4:duvernostUdaju
n17:S
n4:entitaPredkladatele
n8:predkladatel
n4:idSjednocenehoVysledku
174342
n4:idVysledku
RIV/00216305:26310/12:PU100117
n4:jazykVysledku
n10:eng
n4:klicovaSlova
film thickness, chromatic white light, interference microscopy, thin soft organic films
n4:klicoveSlovo
n7:film%20thickness n7:chromatic%20white%20light n7:interference%20microscopy n7:thin%20soft%20organic%20films
n4:kontrolniKodProRIV
[6455E52B3505]
n4:obor
n12:CF
n4:pocetDomacichTvurcuVysledku
6
n4:pocetTvurcuVysledku
9
n4:projekt
n16:ED0012%2F01%2F01
n4:rokUplatneniVysledku
n11:2012
n4:tvurceVysledku
Siderov, Vasil Mladenova, Daniela Zhivkov, Ivaylo Salyk, Ota Weiter, Martin Ohlídal, Miloslav
n9:organizacniJednotka
26310