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Statements

Subject Item
n2:RIV%2F00216305%3A26310%2F11%3APU93874%21RIV12-MSM-26310___
rdf:type
skos:Concept n10:Vysledek
dcterms:description
PECVD of hexamethyldisiloxane was performed in order to study dependence of the process on duty cycle. Capacitively coupled plasma was measured via optical emission spectroscopy. Experiment shows that dependence of fragment populations on duty cycle was increasing with increasing duty cycle in the case of constant supplied power, however, there was a maximum detected at 30 % in the case of constant mean power. This point might be an optimal setup for the deposition of SiO2 thin films from hexamethyldisiloxane. PECVD of hexamethyldisiloxane was performed in order to study dependence of the process on duty cycle. Capacitively coupled plasma was measured via optical emission spectroscopy. Experiment shows that dependence of fragment populations on duty cycle was increasing with increasing duty cycle in the case of constant supplied power, however, there was a maximum detected at 30 % in the case of constant mean power. This point might be an optimal setup for the deposition of SiO2 thin films from hexamethyldisiloxane.
dcterms:title
PECVD of hexamethyldisiloxane: Pulsed mode PECVD of hexamethyldisiloxane: Pulsed mode
skos:prefLabel
PECVD of hexamethyldisiloxane: Pulsed mode PECVD of hexamethyldisiloxane: Pulsed mode
skos:notation
RIV/00216305:26310/11:PU93874!RIV12-MSM-26310___
n10:predkladatel
n17:orjk%3A26310
n5:aktivita
n16:Z n16:S
n5:aktivity
S, Z(MSM0021630501)
n5:dodaniDat
n13:2012
n5:domaciTvurceVysledku
n15:2888165 n15:9496513 n15:7294697
n5:druhVysledku
n6:O
n5:duvernostUdaju
n11:S
n5:entitaPredkladatele
n18:predkladatel
n5:idSjednocenehoVysledku
219802
n5:idVysledku
RIV/00216305:26310/11:PU93874
n5:jazykVysledku
n8:eng
n5:klicovaSlova
Optical emission spectroscopy, Hexamethyldisiloxane, Thin film deposition
n5:klicoveSlovo
n9:Thin%20film%20deposition n9:Optical%20emission%20spectroscopy n9:Hexamethyldisiloxane
n5:kontrolniKodProRIV
[E14C4470F113]
n5:obor
n14:BL
n5:pocetDomacichTvurcuVysledku
3
n5:pocetTvurcuVysledku
3
n5:rokUplatneniVysledku
n13:2011
n5:tvurceVysledku
Procházka, Michal Blahová, Lucie Krčma, František
n5:zamer
n12:MSM0021630501
n4:organizacniJednotka
26310