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Statements

Subject Item
n2:RIV%2F00216305%3A26310%2F07%3APU70613%21RIV10-MSM-26310___
rdf:type
n10:Vysledek skos:Concept
dcterms:description
Plasma polymer films of tetravinylsilane were deposited on silicon wafers using an RF glow discharge operated in pulsed mode. Microscopic and spectroscopic techniques revealed that physico-chemical properties of plasma polymer depend on the effective power used if the flow rate was constant. The deposition rate (8 - 165 nm min-1) and surface roughness (2.0 - 5.8 nm) of films varied with the RF power. An organic/inorganic character (C/Si ratio) of films and a content of vinyl groups could be controlled by the effective power. The refractive index of films increased with power from 1.63 (0.05 W) to 1.75 (10 W) at a wavelength of 633 nm and the extinction coefficient rose sharply with the power from 0.09 (0.05 W) to 0.37 (10 W) at a wavelength of 240 nm. The elastic modulus and hardness of plasma polymer could be varied from 11 GPa (0.05 W) to 30 GPa (10 W) and from 1.4 to 5.9 GPa, respectively. Plasma polymer films of tetravinylsilane were deposited on silicon wafers using an RF glow discharge operated in pulsed mode. Microscopic and spectroscopic techniques revealed that physico-chemical properties of plasma polymer depend on the effective power used if the flow rate was constant. The deposition rate (8 - 165 nm min-1) and surface roughness (2.0 - 5.8 nm) of films varied with the RF power. An organic/inorganic character (C/Si ratio) of films and a content of vinyl groups could be controlled by the effective power. The refractive index of films increased with power from 1.63 (0.05 W) to 1.75 (10 W) at a wavelength of 633 nm and the extinction coefficient rose sharply with the power from 0.09 (0.05 W) to 0.37 (10 W) at a wavelength of 240 nm. The elastic modulus and hardness of plasma polymer could be varied from 11 GPa (0.05 W) to 30 GPa (10 W) and from 1.4 to 5.9 GPa, respectively.
dcterms:title
Physico-chemical properties of plasma-polymerized tetravinylsilane Physico-chemical properties of plasma-polymerized tetravinylsilane
skos:prefLabel
Physico-chemical properties of plasma-polymerized tetravinylsilane Physico-chemical properties of plasma-polymerized tetravinylsilane
skos:notation
RIV/00216305:26310/07:PU70613!RIV10-MSM-26310___
n3:aktivita
n12:Z n12:P
n3:aktivity
P(1P05OC087), P(GA104/03/0236), P(OC 527.110), Z(AV0Z10480505)
n3:cisloPeriodika
10
n3:dodaniDat
n9:2010
n3:domaciTvurceVysledku
n5:5141249 n5:2036126
n3:druhVysledku
n14:J
n3:duvernostUdaju
n8:S
n3:entitaPredkladatele
n13:predkladatel
n3:idSjednocenehoVysledku
441332
n3:idVysledku
RIV/00216305:26310/07:PU70613
n3:jazykVysledku
n19:eng
n3:klicovaSlova
Nano-indentation, Atomic force microscopy (AFM), Ellipsometry, Infrared spectroscopy, Rutherford backscattering spectroscopy, PACVD
n3:klicoveSlovo
n6:Infrared%20spectroscopy n6:Ellipsometry n6:Atomic%20force%20microscopy%20%28AFM%29 n6:Rutherford%20backscattering%20spectroscopy n6:PACVD n6:Nano-indentation
n3:kodStatuVydavatele
CZ - Česká republika
n3:kontrolniKodProRIV
[93D938D8CC7C]
n3:nazevZdroje
Surface and Coatings Technology
n3:obor
n17:CF
n3:pocetDomacichTvurcuVysledku
2
n3:pocetTvurcuVysledku
4
n3:projekt
n7:GA104%2F03%2F0236 n7:1P05OC087 n7:OC%20527.110
n3:rokUplatneniVysledku
n9:2007
n3:svazekPeriodika
201
n3:tvurceVysledku
Conte, Nicolas Čech, Vladimír Studýnka, Jan Peřina, Vratislav
n3:zamer
n15:AV0Z10480505
s:issn
0257-8972
s:numberOfPages
6
n18:organizacniJednotka
26310