This HTML5 document contains 54 embedded RDF statements represented using HTML+Microdata notation.

The embedded RDF content will be recognized by any processor of HTML5 Microdata.

Namespace Prefixes

PrefixIRI
n16http://linked.opendata.cz/ontology/domain/vavai/riv/typAkce/
dctermshttp://purl.org/dc/terms/
n8http://localhost/temp/predkladatel/
n3http://purl.org/net/nknouf/ns/bibtex#
n14http://linked.opendata.cz/resource/domain/vavai/riv/tvurce/
n19http://linked.opendata.cz/ontology/domain/vavai/
n15http://linked.opendata.cz/resource/domain/vavai/vysledek/RIV%2F00216305%3A26310%2F03%3APU38274%21RIV%2F2004%2FMSM%2F263104%2FN/
n21https://schema.org/
n6http://linked.opendata.cz/resource/domain/vavai/zamer/
shttp://schema.org/
skoshttp://www.w3.org/2004/02/skos/core#
n5http://linked.opendata.cz/ontology/domain/vavai/riv/
n2http://linked.opendata.cz/resource/domain/vavai/vysledek/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
n10http://linked.opendata.cz/ontology/domain/vavai/riv/klicoveSlovo/
n18http://linked.opendata.cz/ontology/domain/vavai/riv/duvernostUdaju/
xsdhhttp://www.w3.org/2001/XMLSchema#
n20http://linked.opendata.cz/ontology/domain/vavai/riv/aktivita/
n11http://linked.opendata.cz/ontology/domain/vavai/riv/jazykVysledku/
n13http://linked.opendata.cz/ontology/domain/vavai/riv/druhVysledku/
n7http://linked.opendata.cz/ontology/domain/vavai/riv/obor/
n12http://reference.data.gov.uk/id/gregorian-year/

Statements

Subject Item
n2:RIV%2F00216305%3A26310%2F03%3APU38274%21RIV%2F2004%2FMSM%2F263104%2FN
rdf:type
skos:Concept n19:Vysledek
dcterms:description
The main part of this work is focused on the identification of the spectra measured during the plasma deposition using the vinyltriethoxysilane in a continual regime and also in a pulsed regime with the varied relative pulse duration and during deposition with an amount of oxygen added in various ratios. The next part is focused on spectroscopic observation during the plasma deposition using the hexamethyldisiloxane and gamma-metacryloxyprophyltrimethoxysilane. The main part of this work is focused on the identification of the spectra measured during the plasma deposition using the vinyltriethoxysilane in a continual regime and also in a pulsed regime with the varied relative pulse duration and during deposition with an amount of oxygen added in various ratios. The next part is focused on spectroscopic observation during the plasma deposition using the hexamethyldisiloxane and gamma-metacryloxyprophyltrimethoxysilane.
dcterms:title
Spectroscopic monitoring of low pressure plasma deposition of Silane and Siloxane based thin films Spectroscopic monitoring of low pressure plasma deposition of Silane and Siloxane based thin films
skos:prefLabel
Spectroscopic monitoring of low pressure plasma deposition of Silane and Siloxane based thin films Spectroscopic monitoring of low pressure plasma deposition of Silane and Siloxane based thin films
skos:notation
RIV/00216305:26310/03:PU38274!RIV/2004/MSM/263104/N
n5:strany
441-445
n5:aktivita
n20:Z
n5:aktivity
Z(MSM 263100019)
n5:dodaniDat
n12:2004
n5:domaciTvurceVysledku
n14:8194041 n14:5127416 n14:6073387 n14:2201976 n14:2036126 n14:2888165 n14:8402620
n5:druhVysledku
n13:D
n5:duvernostUdaju
n18:S
n5:entitaPredkladatele
n15:predkladatel
n5:idSjednocenehoVysledku
628162
n5:idVysledku
RIV/00216305:26310/03:PU38274
n5:jazykVysledku
n11:eng
n5:klicovaSlova
Plasma deposition, optical emission spectroscopy, organosilicones
n5:klicoveSlovo
n10:optical%20emission%20spectroscopy n10:Plasma%20deposition n10:organosilicones
n5:kontrolniKodProRIV
[C57AE617F524]
n5:mistoKonaniAkce
Praha
n5:mistoVydani
Praha
n5:nazevZdroje
Proceedings of the 12th Annual Conference of Doctoral Students - WDS 2003
n5:obor
n7:BL
n5:pocetDomacichTvurcuVysledku
7
n5:pocetTvurcuVysledku
7
n5:pocetUcastnikuAkce
0
n5:pocetZahranicnichUcastnikuAkce
0
n5:rokUplatneniVysledku
n12:2003
n5:tvurceVysledku
Havelková, Iveta Přikryl, Radek Šormová, Hana Vaněk, Jan Čech, Vladimír Krčma, František Rašková, Zuzana
n5:typAkce
n16:EUR
n5:zahajeniAkce
2003-06-10+02:00
n5:zamer
n6:MSM%20263100019
s:numberOfPages
5
n3:hasPublisher
MATFYZPRESS
n21:isbn
80-86732-18-5
n8:organizacniJednotka
26310