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Statements

Subject Item
n2:RIV%2F00216305%3A26220%2F13%3APU105429%21RIV14-MSM-26220___
rdf:type
n8:Vysledek skos:Concept
dcterms:description
A pressure sensor with high resolution is of key importance for precise measurements in the low-pressure range. The intrinsic resolution of piezoresistive ceramic pressure sensors (CPSs) mainly depends on their functional sensitivity and the electronic noise in the thick-film resistors. Both the sensitivity and the noise level depend on the material and the structural properties, and the dimensions of the sensing structure. In general, the sensitivity can be increased and the noise can be reduced by using additional electronics for the signal processing, but this makes the sensor bigger, more complex and more expensive. In this study we discuss the technological limits for downscaling the sensors pressure range without any processing of the sensors signal. The intrinsic resolution of the piezoresistive pressure sensors designed for the pressure range 0 to 100 mbar and realised in LTCC (Low Temperature Cofired Ceramic) technology was evaluated and compared to the resolution of a commercial 100-mbar sil A pressure sensor with high resolution is of key importance for precise measurements in the low-pressure range. The intrinsic resolution of piezoresistive ceramic pressure sensors (CPSs) mainly depends on their functional sensitivity and the electronic noise in the thick-film resistors. Both the sensitivity and the noise level depend on the material and the structural properties, and the dimensions of the sensing structure. In general, the sensitivity can be increased and the noise can be reduced by using additional electronics for the signal processing, but this makes the sensor bigger, more complex and more expensive. In this study we discuss the technological limits for downscaling the sensors pressure range without any processing of the sensors signal. The intrinsic resolution of the piezoresistive pressure sensors designed for the pressure range 0 to 100 mbar and realised in LTCC (Low Temperature Cofired Ceramic) technology was evaluated and compared to the resolution of a commercial 100-mbar sil
dcterms:title
Comparison of the Intrinsic Characteristics of LTCC and Silicon Pressure Sensors by Means of 1/f Noise Measurements Comparison of the Intrinsic Characteristics of LTCC and Silicon Pressure Sensors by Means of 1/f Noise Measurements
skos:prefLabel
Comparison of the Intrinsic Characteristics of LTCC and Silicon Pressure Sensors by Means of 1/f Noise Measurements Comparison of the Intrinsic Characteristics of LTCC and Silicon Pressure Sensors by Means of 1/f Noise Measurements
skos:notation
RIV/00216305:26220/13:PU105429!RIV14-MSM-26220___
n8:predkladatel
n9:orjk%3A26220
n3:aktivita
n18:P
n3:aktivity
P(ED2.1.00/03.0072), P(MEB091129)
n3:cisloPeriodika
1
n3:dodaniDat
n14:2014
n3:domaciTvurceVysledku
n4:9770690 n4:7899696 n4:6541763 n4:3455009 n4:1629786
n3:druhVysledku
n13:J
n3:duvernostUdaju
n19:S
n3:entitaPredkladatele
n10:predkladatel
n3:idSjednocenehoVysledku
66337
n3:idVysledku
RIV/00216305:26220/13:PU105429
n3:jazykVysledku
n5:eng
n3:klicovaSlova
LTCC pressure sensor, intrinsic resolution, noise spectral density
n3:klicoveSlovo
n16:noise%20spectral%20density n16:LTCC%20pressure%20sensor n16:intrinsic%20resolution
n3:kodStatuVydavatele
CZ - Česká republika
n3:kontrolniKodProRIV
[2D18857BAC75]
n3:nazevZdroje
Radioengineering
n3:obor
n7:JA
n3:pocetDomacichTvurcuVysledku
5
n3:pocetTvurcuVysledku
7
n3:projekt
n6:MEB091129 n6:ED2.1.00%2F03.0072
n3:rokUplatneniVysledku
n14:2013
n3:svazekPeriodika
22
n3:tvurceVysledku
Belavic, Darko Sedláková, Vlasta Santo-Zarnik, Marina Šikula, Josef Sedlák, Petr Kopecký, Martin Majzner, Jiří
s:issn
1210-2512
s:numberOfPages
6
n17:organizacniJednotka
26220