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Statements

Subject Item
n2:RIV%2F00216305%3A26220%2F13%3APU104820%21RIV14-MSM-26220___
rdf:type
n8:Vysledek skos:Concept
dcterms:description
Polyethylenterepthalate (PET) pretreatment is one of the most important steps for reliable copper conductive structure realization. Two types of pretreatments were tested. Chemical pretreatment with NaOH and physical pretreatment with plasma. Thin copper layer on PET surface was realized with cathode Cu sputtering. Photolithography techniques were used for preparing open areas for electrochemical copper plating and than differential Cu etching for conductive structures formation. Properties of pretreatments were evaluated with different methods: AFM, contact angle measurement, surface energies calculation and scratch test. Polyethylenterepthalate (PET) pretreatment is one of the most important steps for reliable copper conductive structure realization. Two types of pretreatments were tested. Chemical pretreatment with NaOH and physical pretreatment with plasma. Thin copper layer on PET surface was realized with cathode Cu sputtering. Photolithography techniques were used for preparing open areas for electrochemical copper plating and than differential Cu etching for conductive structures formation. Properties of pretreatments were evaluated with different methods: AFM, contact angle measurement, surface energies calculation and scratch test.
dcterms:title
Polyethylenterepthalate surface pretreatment Polyethylenterepthalate surface pretreatment
skos:prefLabel
Polyethylenterepthalate surface pretreatment Polyethylenterepthalate surface pretreatment
skos:notation
RIV/00216305:26220/13:PU104820!RIV14-MSM-26220___
n8:predkladatel
n9:orjk%3A26220
n3:aktivita
n13:S
n3:aktivity
S
n3:dodaniDat
n12:2014
n3:domaciTvurceVysledku
n5:1800019 n5:9050930 n5:4363035 n5:5238439 n5:7600224 n5:9024034
n3:druhVysledku
n17:D
n3:duvernostUdaju
n10:S
n3:entitaPredkladatele
n19:predkladatel
n3:idSjednocenehoVysledku
97069
n3:idVysledku
RIV/00216305:26220/13:PU104820
n3:jazykVysledku
n16:eng
n3:klicovaSlova
Polyehthylenterepthalate (PET), pretreatment, cathode Cu sputtering, AFM method, contact angle, scratch test, surface energy
n3:klicoveSlovo
n4:pretreatment n4:Polyehthylenterepthalate%20%28PET%29 n4:contact%20angle n4:cathode%20Cu%20sputtering n4:surface%20energy n4:scratch%20test n4:AFM%20method
n3:kontrolniKodProRIV
[53B3CF9AAE72]
n3:mistoKonaniAkce
Brno
n3:mistoVydani
Brno
n3:nazevZdroje
Electronic Devices and Systems, IMAPS CS International Conference 2013
n3:obor
n11:JA
n3:pocetDomacichTvurcuVysledku
6
n3:pocetTvurcuVysledku
6
n3:rokUplatneniVysledku
n12:2013
n3:tvurceVysledku
Chmela, Ondřej Čížek, Jan Šubarda, Jiří Starý, Jiří Čudek, Pavel Prášek, Jan
n3:typAkce
n15:WRD
n3:zahajeniAkce
2013-06-26+02:00
s:numberOfPages
5
n20:hasPublisher
Vysoké učení technické v Brně
n14:isbn
978-80-214-4754-7
n18:organizacniJednotka
26220