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Statements

Subject Item
n2:RIV%2F00216305%3A26220%2F12%3APU99549%21RIV13-MSM-26220___
rdf:type
n5:Vysledek skos:Concept
dcterms:description
This paper reports on design and fabrication of the low power MEMS heating membrane - micromachined hotplates. This type of device is very often used for gas-sensing applications. The aim of this work is to produce heating membrane with the power consumption below 100 mW at the operating temperature 480 C. The sample which is going to be produced will be the membrane with size of 1x1 mm, to ascertain the applicable process of the fabrication technology and the applicable design of the micro-hotplate. This paper reports on design and fabrication of the low power MEMS heating membrane - micromachined hotplates. This type of device is very often used for gas-sensing applications. The aim of this work is to produce heating membrane with the power consumption below 100 mW at the operating temperature 480 C. The sample which is going to be produced will be the membrane with size of 1x1 mm, to ascertain the applicable process of the fabrication technology and the applicable design of the micro-hotplate.
dcterms:title
Low power MEMS heating membrane Low power MEMS heating membrane
skos:prefLabel
Low power MEMS heating membrane Low power MEMS heating membrane
skos:notation
RIV/00216305:26220/12:PU99549!RIV13-MSM-26220___
n5:predkladatel
n6:orjk%3A26220
n3:aktivita
n10:P
n3:aktivity
P(ED1.1.00/02.0068), P(EE2.3.20.0027)
n3:dodaniDat
n8:2013
n3:domaciTvurceVysledku
Márik, Marian n11:4489705 n11:8902674 n11:4490916 n11:3956733 n11:1083988
n3:druhVysledku
n15:D
n3:duvernostUdaju
n22:S
n3:entitaPredkladatele
n13:predkladatel
n3:idSjednocenehoVysledku
147503
n3:idVysledku
RIV/00216305:26220/12:PU99549
n3:jazykVysledku
n18:eng
n3:klicovaSlova
MEMS (microelectromechanical system), micro-hotplate, power consumption, micromachining.
n3:klicoveSlovo
n9:power%20consumption n9:MEMS%20%28microelectromechanical%20system%29 n9:micro-hotplate n9:micromachining.
n3:kontrolniKodProRIV
[596A0F837729]
n3:mistoKonaniAkce
Brno
n3:mistoVydani
Brno
n3:nazevZdroje
EDS 12 IMAPS CS INTERNATIONAL CONFERENCE PROCEEDINGS
n3:obor
n4:JB
n3:pocetDomacichTvurcuVysledku
6
n3:pocetTvurcuVysledku
6
n3:projekt
n19:ED1.1.00%2F02.0068 n19:EE2.3.20.0027
n3:rokUplatneniVysledku
n8:2012
n3:tvurceVysledku
Pekárek, Jan Márik, Marian Svatoš, Vojtěch Chomoucká, Jana Hrdý, Radim Hubálek, Jaromír
n3:typAkce
n14:WRD
n3:zahajeniAkce
2012-06-28+02:00
s:numberOfPages
4
n20:hasPublisher
Vysoké učení technické v Brně
n21:isbn
978-80-214-4539-0
n16:organizacniJednotka
26220