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Statements

Subject Item
n2:RIV%2F00216305%3A26220%2F12%3APU101137%21RIV14-MSM-26220___
rdf:type
skos:Concept n9:Vysledek
dcterms:description
A high resolution of a pressure sensor is of key importance for precise measurements in the low pressure range. The intrinsic resolution of the piezoresistive ceramic pressure sensors (CPSs) depends on its functional sensitivity and the electronic noise in the thick-film resistors. The sensitivity and the noise level depend on the material and structural properties, and the dimensions of the sensing structure. For an optimized sensor design the noise measured at its output can be reduced by using additional electronics for signal processing which results in incensement of the sensor complexity and the final cost. In this work we discuss the technological limits for downscaling the sensors pressure range without any processing of the sensors signal. The intrinsic resolution of the piezoresistive LTCC pressure sensors, designed for the pressure range 0 to 100 mbar was evaluated and compared to the resolution of the commercial 100-mbar silicon pressure sensor. A high resolution of a pressure sensor is of key importance for precise measurements in the low pressure range. The intrinsic resolution of the piezoresistive ceramic pressure sensors (CPSs) depends on its functional sensitivity and the electronic noise in the thick-film resistors. The sensitivity and the noise level depend on the material and structural properties, and the dimensions of the sensing structure. For an optimized sensor design the noise measured at its output can be reduced by using additional electronics for signal processing which results in incensement of the sensor complexity and the final cost. In this work we discuss the technological limits for downscaling the sensors pressure range without any processing of the sensors signal. The intrinsic resolution of the piezoresistive LTCC pressure sensors, designed for the pressure range 0 to 100 mbar was evaluated and compared to the resolution of the commercial 100-mbar silicon pressure sensor.
dcterms:title
INTRINSIC RESOLUTION OF A PIEZORESISTIVE CERAMIC PRESSURE SENSOR INTRINSIC RESOLUTION OF A PIEZORESISTIVE CERAMIC PRESSURE SENSOR
skos:prefLabel
INTRINSIC RESOLUTION OF A PIEZORESISTIVE CERAMIC PRESSURE SENSOR INTRINSIC RESOLUTION OF A PIEZORESISTIVE CERAMIC PRESSURE SENSOR
skos:notation
RIV/00216305:26220/12:PU101137!RIV14-MSM-26220___
n9:predkladatel
n10:orjk%3A26220
n5:aktivita
n12:P
n5:aktivity
P(MEB091129)
n5:dodaniDat
n20:2014
n5:domaciTvurceVysledku
n6:7899696 n6:9770690 n6:3455009 n6:1629786 n6:6541763
n5:druhVysledku
n22:D
n5:duvernostUdaju
n14:S
n5:entitaPredkladatele
n15:predkladatel
n5:idSjednocenehoVysledku
142776
n5:idVysledku
RIV/00216305:26220/12:PU101137
n5:jazykVysledku
n21:eng
n5:klicovaSlova
LTCC pressure sensor, intrinsic resolution, noise spectral density
n5:klicoveSlovo
n11:noise%20spectral%20density n11:intrinsic%20resolution n11:LTCC%20pressure%20sensor
n5:kontrolniKodProRIV
[3DFC06DCE24E]
n5:mistoKonaniAkce
Brno
n5:mistoVydani
Neuveden
n5:nazevZdroje
EDS 2012 Proceedings
n5:obor
n8:JA
n5:pocetDomacichTvurcuVysledku
5
n5:pocetTvurcuVysledku
7
n5:projekt
n7:MEB091129
n5:rokUplatneniVysledku
n20:2012
n5:tvurceVysledku
Belavič, Darko Kopecký, Martin Santo-Zarnik, Marina Sedlák, Petr Sedláková, Vlasta Majzner, Jiří Šikula, Josef
n5:typAkce
n17:WRD
n5:zahajeniAkce
2012-06-28+02:00
s:numberOfPages
6
n16:hasPublisher
IMAPS CZ&SK
n13:isbn
978-80-214-4539-0
n3:organizacniJednotka
26220