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Statements

Subject Item
n2:RIV%2F00216305%3A26220%2F11%3APU93554%21RIV12-MSM-26220___
rdf:type
n9:Vysledek skos:Concept
dcterms:description
The paper deals with novel Micro-Electro-Mechanical System (MEMS) structure. The structure was designed to be utilized as capacitance pressure sensor. The most applicable topology of the MEMS structure was selected by means of electrostatic model analysis made by MatLAB software. There were proposed five structures and the best solution was selected as the chessboard structure, since it provides the suitable capacity for the sensor measurement range. The overall capacity and also sensitivity of the MEMS sensor was increased by means of carbon nanotubes (CNTs). Therefore the pressure measurement range increased as well. The comparison between conventional capacitance sensor structures and the presented proposal shown, that the improvement depends on the area and number of the growing fields. However this improvement is from tens to hundereds of percents. The article depicts the design process including simulations and analysis of the chosen structure too. The paper deals with novel Micro-Electro-Mechanical System (MEMS) structure. The structure was designed to be utilized as capacitance pressure sensor. The most applicable topology of the MEMS structure was selected by means of electrostatic model analysis made by MatLAB software. There were proposed five structures and the best solution was selected as the chessboard structure, since it provides the suitable capacity for the sensor measurement range. The overall capacity and also sensitivity of the MEMS sensor was increased by means of carbon nanotubes (CNTs). Therefore the pressure measurement range increased as well. The comparison between conventional capacitance sensor structures and the presented proposal shown, that the improvement depends on the area and number of the growing fields. However this improvement is from tens to hundereds of percents. The article depicts the design process including simulations and analysis of the chosen structure too.
dcterms:title
Design, modeling and fabrication of novel MEMS structure utilizing carbon nanotubes Design, modeling and fabrication of novel MEMS structure utilizing carbon nanotubes
skos:prefLabel
Design, modeling and fabrication of novel MEMS structure utilizing carbon nanotubes Design, modeling and fabrication of novel MEMS structure utilizing carbon nanotubes
skos:notation
RIV/00216305:26220/11:PU93554!RIV12-MSM-26220___
n9:predkladatel
n10:orjk%3A26220
n4:aktivita
n5:Z n5:P
n4:aktivity
P(2A-1TP1/143), P(GA102/09/1601), Z(MSM0021630503)
n4:dodaniDat
n13:2012
n4:domaciTvurceVysledku
n6:4135660 n6:1552104 n6:1083988 n6:1609084 n6:1904345
n4:druhVysledku
n19:D
n4:duvernostUdaju
n8:S
n4:entitaPredkladatele
n14:predkladatel
n4:idSjednocenehoVysledku
193536
n4:idVysledku
RIV/00216305:26220/11:PU93554
n4:jazykVysledku
n16:eng
n4:klicovaSlova
MEMS, capacitive sensor, carbon nanotubes
n4:klicoveSlovo
n7:capacitive%20sensor n7:carbon%20nanotubes n7:MEMS
n4:kontrolniKodProRIV
[E936BDE8500D]
n4:mistoKonaniAkce
Brighton
n4:mistoVydani
Brighton
n4:nazevZdroje
Proceedings of 18th European microelectronics packaging conference EMPC 2011
n4:obor
n22:JA
n4:pocetDomacichTvurcuVysledku
5
n4:pocetTvurcuVysledku
5
n4:projekt
n11:2A-1TP1%2F143 n11:GA102%2F09%2F1601
n4:rokUplatneniVysledku
n13:2011
n4:tvurceVysledku
Pavlík, Michal Magát, Martin Pekárek, Jan Háze, Jiří Vrba, Radimír
n4:typAkce
n17:WRD
n4:zahajeniAkce
2011-09-12+02:00
n4:zamer
n21:MSM0021630503
s:numberOfPages
5
n20:hasPublisher
Neuveden
n15:isbn
978-0-9568086-0-8
n18:organizacniJednotka
26220