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Statements

Subject Item
n2:RIV%2F00216305%3A26220%2F04%3APU44208%21RIV06-GA0-26220___
rdf:type
n14:Vysledek skos:Concept
dcterms:description
The nanomachining techniques in the field of thin films are described. The presented techniques make possible fabrication of nanostructures without utilization of high-resolution electron-beam lithography. Self-ordering of aluminium during anodization is employed in nanomachining. Nanomachinig is presented as a low cost technology for microelectronic industry. Results of nanoporous ceramic fabrication focused on the importance of electropolishing for obtaining the requested sizes of a nanostructure. A method of preparation of the nanomachined ceramic used as a template is discussed. The nanorods (nanowires) were created. Nanostructures were scanned by the electron-beam microscope (SEM). Nanomechanizující techniky v oblasti tenkých vrstev jsou zde popsány. Prezentované techniky ukazují možnost vytváření nanostruktur bez použití elektronové litografu s vysokým rozlišením. Anodizovaná keramika byla použita jako maska pro vytvoření nanotyčinek. Vytvořeneé struktury byly nanlyzovány pomocí SEM. The nanomachining techniques in the field of thin films are described. The presented techniques make possible fabrication of nanostructures without utilization of high-resolution electron-beam lithography. Self-ordering of aluminium during anodization is employed in nanomachining. Nanomachinig is presented as a low cost technology for microelectronic industry. Results of nanoporous ceramic fabrication focused on the importance of electropolishing for obtaining the requested sizes of a nanostructure. A method of preparation of the nanomachined ceramic used as a template is discussed. The nanorods (nanowires) were created. Nanostructures were scanned by the electron-beam microscope (SEM).
dcterms:title
Nelitorgrafické vytváření nanostrukturovaných vrstev Nonlitographic Nanostructured Film Fabrication Nonlitographic Nanostructured Film Fabrication
skos:prefLabel
Nonlitographic Nanostructured Film Fabrication Nonlitographic Nanostructured Film Fabrication Nelitorgrafické vytváření nanostrukturovaných vrstev
skos:notation
RIV/00216305:26220/04:PU44208!RIV06-GA0-26220___
n3:strany
495-500
n3:aktivita
n13:Z n13:P
n3:aktivity
P(GP102/04/P162), Z(MSM 262200022)
n3:dodaniDat
n16:2006
n3:domaciTvurceVysledku
n20:4489705
n3:druhVysledku
n19:D
n3:duvernostUdaju
n12:S
n3:entitaPredkladatele
n7:predkladatel
n3:idSjednocenehoVysledku
576403
n3:idVysledku
RIV/00216305:26220/04:PU44208
n3:jazykVysledku
n18:eng
n3:klicovaSlova
Self-ordering, nanopores, nanorods, nanowires
n3:klicoveSlovo
n9:nanopores n9:Self-ordering n9:nanowires n9:nanorods
n3:kontrolniKodProRIV
[82BA19166BAE]
n3:mistoKonaniAkce
Prague
n3:mistoVydani
Lanškroun
n3:nazevZdroje
3rd European Microelectrinics and Packaging Symposium
n3:obor
n10:JA
n3:pocetDomacichTvurcuVysledku
1
n3:pocetTvurcuVysledku
1
n3:projekt
n15:GP102%2F04%2FP162
n3:rokUplatneniVysledku
n16:2004
n3:tvurceVysledku
Hubálek, Jaromír
n3:typAkce
n4:WRD
n3:zahajeniAkce
2004-06-16+02:00
n3:zamer
n11:MSM%20262200022
s:numberOfPages
6
n6:hasPublisher
IMAPS CZ&SK chapter
n21:isbn
80-239-2835-X
n22:organizacniJednotka
26220