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Statements

Subject Item
n2:RIV%2F00216305%3A26220%2F03%3APU40387%21RIV%2F2004%2FMSM%2F262204%2FN
rdf:type
n12:Vysledek skos:Concept
dcterms:description
By means of an adapted screen-printing technique, sensitive layers of nanopowder tungsten trioxide were deposited on silicon micromachined substrates. The thickness of the sensing layers was 5 um and particle size was around 50 nm. Each chip contains four thin silicon nitride membranes, in the center of which a polysilicon heating resistor, insulating layers, platinum electrodes and sensitive layer are stacked. Unlike in previously reported works, the technological procedure reported here allows for depositing the sensing layers before the membranes have been etched. This avoids damaging the membranes during film deposition, which leads to gas sensor microsystems with an excellent fabrication yield [1]. The deposition method overcomes disadvantages such as low porosity and low surface area, generally associated to chemical vapor deposition or sputtering methods, and keeps power consumption low (80 mW for a working temperature of 480oC). As an example, the sensor response to ammonia, NO2, ethanol, By means of an adapted screen-printing technique, sensitive layers of nanopowder tungsten trioxide were deposited on silicon micromachined substrates. The thickness of the sensing layers was 5 um and particle size was around 50 nm. Each chip contains four thin silicon nitride membranes, in the center of which a polysilicon heating resistor, insulating layers, platinum electrodes and sensitive layer are stacked. Unlike in previously reported works, the technological procedure reported here allows for depositing the sensing layers before the membranes have been etched. This avoids damaging the membranes during film deposition, which leads to gas sensor microsystems with an excellent fabrication yield [1]. The deposition method overcomes disadvantages such as low porosity and low surface area, generally associated to chemical vapor deposition or sputtering methods, and keeps power consumption low (80 mW for a working temperature of 480oC). As an example, the sensor response to ammonia, NO2, ethanol,
dcterms:title
Screen-printed nano-grain WO3 films for micro hotplate gas sensors Screen-printed nano-grain WO3 films for micro hotplate gas sensors
skos:prefLabel
Screen-printed nano-grain WO3 films for micro hotplate gas sensors Screen-printed nano-grain WO3 films for micro hotplate gas sensors
skos:notation
RIV/00216305:26220/03:PU40387!RIV/2004/MSM/262204/N
n4:strany
358-363
n4:aktivita
n18:Z
n4:aktivity
Z(MSM 262200022)
n4:dodaniDat
n5:2004
n4:domaciTvurceVysledku
n17:7689888 n17:4489705
n4:druhVysledku
n11:D
n4:duvernostUdaju
n21:S
n4:entitaPredkladatele
n16:predkladatel
n4:idSjednocenehoVysledku
626450
n4:idVysledku
RIV/00216305:26220/03:PU40387
n4:jazykVysledku
n9:eng
n4:klicovaSlova
micromachined gas sensor, screen-printing, nanopowder,tungsten trioxide.
n4:klicoveSlovo
n6:micromachined%20gas%20sensor n6:screen-printing n6:nanopowder n6:tungsten%20trioxide.
n4:kontrolniKodProRIV
[04BBA1C49DCE]
n4:mistoKonaniAkce
Toronto
n4:mistoVydani
Toronto
n4:nazevZdroje
IEEE Sensors 2003,Second IEEE International Conference on Sensors
n4:obor
n19:JB
n4:pocetDomacichTvurcuVysledku
2
n4:pocetTvurcuVysledku
10
n4:pocetUcastnikuAkce
0
n4:pocetZahranicnichUcastnikuAkce
0
n4:rokUplatneniVysledku
n5:2003
n4:tvurceVysledku
Hubálek, Jaromír Malysz, Karel
n4:typAkce
n7:WRD
n4:zahajeniAkce
2003-10-22+02:00
n4:zamer
n20:MSM%20262200022
s:numberOfPages
6
n10:hasPublisher
The Printing House, Stoughton, USA
n15:isbn
0-7803-8134-3
n3:organizacniJednotka
26220