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Statements

Subject Item
n2:RIV%2F00216305%3A26220%2F03%3APU38835%21RIV06-MSM-26220___
rdf:type
skos:Concept n17:Vysledek
dcterms:description
The aim of this work is the development of micromachined metal oxide sensor arrays for environmental applications such as the selective detection of ammonia in the atmosphere. Sensitivity and selectivity studies to ammonia, benzene and ethanol vapours and their binary mixtures was investigated on pure tin and tungsten oxide micromachined gas sensors. It has been found that an excellent identification of the species is possible using a single sensor. Using an adapted screen-printing techniquue, sensitive layers of nanopowder tin dioxide and tungsten trioxide were deposited on silicon micromachined substrates. The morphology and composition of deposited films were investigated by SEM, XRD and EDX. The aim of this work is the development of micromachined metal oxide sensor arrays for environmental applications such as the selective detection of ammonia in the atmosphere. Sensitivity and selectivity studies to ammonia, benzene and ethanol vapours and their binary mixtures was investigated on pure tin and tungsten oxide micromachined gas sensors. It has been found that an excellent identification of the species is possible using a single sensor. Using an adapted screen-printing techniquue, sensitive layers of nanopowder tin dioxide and tungsten trioxide were deposited on silicon micromachined substrates. The morphology and composition of deposited films were investigated by SEM, XRD and EDX. The aim of this work is the development of micromachined metal oxide sensor arrays for environmental applications such as the selective detection of ammonia in the atmosphere. Sensitivity and selectivity studies to ammonia, benzene and ethanol vapours and their binary mixtures was investigated on pure tin and tungsten oxide micromachined gas sensors. It has been found that an excellent identification of the species is possible using a single sensor. Using an adapted screen-printing techniquue, sensitive layers of nanopowder tin dioxide and tungsten trioxide were deposited on silicon micromachined substrates. The morphology and composition of deposited films were investigated by SEM, XRD and EDX.
dcterms:title
Microhotplate sensor arrays based on sputtered and screen-printed metal oxide films for selective detection of volatile compounds Microhotplate sensor arrays based on sputtered and screen-printed metal oxide films for selective detection of volatile compounds Microhotplate sensor arrays based on sputtered and screen-printed metal oxide films for selective detection of volatile compounds
skos:prefLabel
Microhotplate sensor arrays based on sputtered and screen-printed metal oxide films for selective detection of volatile compounds Microhotplate sensor arrays based on sputtered and screen-printed metal oxide films for selective detection of volatile compounds Microhotplate sensor arrays based on sputtered and screen-printed metal oxide films for selective detection of volatile compounds
skos:notation
RIV/00216305:26220/03:PU38835!RIV06-MSM-26220___
n4:strany
291-291
n4:aktivita
n18:Z
n4:aktivity
Z(MSM 262200022)
n4:dodaniDat
n16:2006
n4:domaciTvurceVysledku
n12:4489705 n12:7689888
n4:druhVysledku
n10:D
n4:duvernostUdaju
n20:S
n4:entitaPredkladatele
n9:predkladatel
n4:idSjednocenehoVysledku
615409
n4:idVysledku
RIV/00216305:26220/03:PU38835
n4:jazykVysledku
n14:eng
n4:klicovaSlova
micro hot plate, sceenprinting, sputtering, SEM, XRD, EDX, ammonia sensor
n4:klicoveSlovo
n6:XRD n6:sputtering n6:sceenprinting n6:SEM n6:EDX n6:micro%20hot%20plate n6:ammonia%20sensor
n4:kontrolniKodProRIV
[AA27F30500AC]
n4:mistoKonaniAkce
Povoa de Varzim
n4:mistoVydani
Povoa de Varzim, Portugalsko
n4:nazevZdroje
Book of tutorials and posters - Smart Sensors and MEMS, NATO Advanced Study Institute
n4:obor
n13:JB
n4:pocetDomacichTvurcuVysledku
2
n4:pocetTvurcuVysledku
3
n4:rokUplatneniVysledku
n16:2003
n4:tvurceVysledku
Hubálek, Jaromír Malysz, Karel Ivanov, Peter
n4:typAkce
n5:WRD
n4:zahajeniAkce
2003-01-01+01:00
n4:zamer
n21:MSM%20262200022
s:numberOfPages
1
n19:hasPublisher
Neuveden
n8:isbn
0-9733840-0-X
n15:organizacniJednotka
26220