This HTML5 document contains 55 embedded RDF statements represented using HTML+Microdata notation.

The embedded RDF content will be recognized by any processor of HTML5 Microdata.

Namespace Prefixes

PrefixIRI
n7http://linked.opendata.cz/ontology/domain/vavai/riv/typAkce/
dctermshttp://purl.org/dc/terms/
n14http://purl.org/net/nknouf/ns/bibtex#
n5http://localhost/temp/predkladatel/
n9http://linked.opendata.cz/resource/domain/vavai/projekt/
n8http://linked.opendata.cz/resource/domain/vavai/riv/tvurce/
n16http://linked.opendata.cz/ontology/domain/vavai/
n18https://schema.org/
n10http://linked.opendata.cz/resource/domain/vavai/zamer/
shttp://schema.org/
skoshttp://www.w3.org/2004/02/skos/core#
n3http://linked.opendata.cz/ontology/domain/vavai/riv/
n2http://linked.opendata.cz/resource/domain/vavai/vysledek/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
n15http://linked.opendata.cz/resource/domain/vavai/vysledek/RIV%2F00216305%3A26220%2F03%3APU38706%21RIV06-GA0-26220___/
n4http://linked.opendata.cz/ontology/domain/vavai/riv/klicoveSlovo/
n22http://linked.opendata.cz/ontology/domain/vavai/riv/duvernostUdaju/
xsdhhttp://www.w3.org/2001/XMLSchema#
n19http://linked.opendata.cz/ontology/domain/vavai/riv/aktivita/
n12http://linked.opendata.cz/ontology/domain/vavai/riv/jazykVysledku/
n20http://linked.opendata.cz/ontology/domain/vavai/riv/obor/
n13http://linked.opendata.cz/ontology/domain/vavai/riv/druhVysledku/
n11http://reference.data.gov.uk/id/gregorian-year/

Statements

Subject Item
n2:RIV%2F00216305%3A26220%2F03%3APU38706%21RIV06-GA0-26220___
rdf:type
n16:Vysledek skos:Concept
dcterms:description
We report on the deposition of screen-printed tin oxide films to fabricate micromachined gas sensors. While in drop-coated or screen-printed devices the deposition of the sensing layer is usually the last step of the process, here the screen-printing wasmade before the backside silicon etching. This procedure avoids damaging the sensor membrane during the active layer deposition, which results in a excellent yield. Results on the morphology and gas sensitivity of the sensors developed are shown and dis scussed. We report on the deposition of screen-printed tin oxide films to fabricate micromachined gas sensors. While in drop-coated or screen-printed devices the deposition of the sensing layer is usually the last step of the process, here the screen-printing wasmade before the backside silicon etching. This procedure avoids damaging the sensor membrane during the active layer deposition, which results in a excellent yield. Results on the morphology and gas sensitivity of the sensors developed are shown and dis scussed. We report on the deposition of screen-printed tin oxide films to fabricate micromachined gas sensors. While in drop-coated or screen-printed devices the deposition of the sensing layer is usually the last step of the process, here the screen-printing wasmade before the backside silicon etching. This procedure avoids damaging the sensor membrane during the active layer deposition, which results in a excellent yield. Results on the morphology and gas sensitivity of the sensors developed are shown and dis scussed.
dcterms:title
Screen-printed nano-grain tin oxide films for micro-hotplate gas sensors Screen-printed nano-grain tin oxide films for micro-hotplate gas sensors Screen-printed nano-grain tin oxide films for micro-hotplate gas sensors
skos:prefLabel
Screen-printed nano-grain tin oxide films for micro-hotplate gas sensors Screen-printed nano-grain tin oxide films for micro-hotplate gas sensors Screen-printed nano-grain tin oxide films for micro-hotplate gas sensors
skos:notation
RIV/00216305:26220/03:PU38706!RIV06-GA0-26220___
n3:strany
145-145
n3:aktivita
n19:P n19:Z
n3:aktivity
P(GA102/00/0939), Z(MSM 262200022)
n3:dodaniDat
n11:2006
n3:domaciTvurceVysledku
n8:7689888 n8:4489705
n3:druhVysledku
n13:D
n3:duvernostUdaju
n22:S
n3:entitaPredkladatele
n15:predkladatel
n3:idSjednocenehoVysledku
626449
n3:idVysledku
RIV/00216305:26220/03:PU38706
n3:jazykVysledku
n12:eng
n3:klicovaSlova
gas sensors, micro-hotplate, thick-film, thin-film
n3:klicoveSlovo
n4:thick-film n4:thin-film n4:gas%20sensors n4:micro-hotplate
n3:kontrolniKodProRIV
[CF3EAEA15239]
n3:mistoKonaniAkce
Barcelona
n3:mistoVydani
Calella de la Costa, Barcelona, Spain
n3:nazevZdroje
4th Conference on Electronic Devices
n3:obor
n20:JA
n3:pocetDomacichTvurcuVysledku
2
n3:pocetTvurcuVysledku
9
n3:projekt
n9:GA102%2F00%2F0939
n3:rokUplatneniVysledku
n11:2003
n3:tvurceVysledku
Correig, Xavier Hubálek, Jaromír Ivanov, Peter Llobet, Eduard Vilanova, Xavier Malysz, Karel Cané, Carlas Gracia, I. Brezmes, Jesús
n3:typAkce
n7:WRD
n3:zahajeniAkce
2003-02-12+01:00
n3:zamer
n10:MSM%20262200022
s:numberOfPages
1
n14:hasPublisher
Instituto de Microelectrónika de Barcelona CNM-CSIC
n18:isbn
84-607-6771-X
n5:organizacniJednotka
26220