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Statements

Subject Item
n2:RIV%2F00216305%3A26220%2F03%3APU38696%21RIV%2F2004%2FMSM%2F262204%2FN
rdf:type
n12:Vysledek skos:Concept
dcterms:description
Either by screen-printing or sputtering, sensitive layers of nanoparticle tin oxide were deposited on silicon micromachined substrates. The procedures allow the deposition of sensing layers before membranes have been etched, which leads to gas micro-sensors with an exellent fabrication yield. The sensors response to ethanol, acetone and ammonia vapours and their binary mixtures was studied. Either by screen-printing or sputtering, sensitive layers of nanoparticle tin oxide were deposited on silicon micromachined substrates. The procedures allow the deposition of sensing layers before membranes have been etched, which leads to gas micro-sensors with an exellent fabrication yield. The sensors response to ethanol, acetone and ammonia vapours and their binary mixtures was studied.
dcterms:title
Sputtered and screen-printed metal oxide-based integrated microsensor arrays for the quantitative analysis of gas mixtures Sputtered and screen-printed metal oxide-based integrated microsensor arrays for the quantitative analysis of gas mixtures
skos:prefLabel
Sputtered and screen-printed metal oxide-based integrated microsensor arrays for the quantitative analysis of gas mixtures Sputtered and screen-printed metal oxide-based integrated microsensor arrays for the quantitative analysis of gas mixtures
skos:notation
RIV/00216305:26220/03:PU38696!RIV/2004/MSM/262204/N
n3:strany
354-357
n3:aktivita
n5:Z
n3:aktivity
Z(MSM 262200022)
n3:dodaniDat
n7:2004
n3:domaciTvurceVysledku
n6:7689888 n6:4489705
n3:druhVysledku
n16:D
n3:duvernostUdaju
n8:S
n3:entitaPredkladatele
n13:predkladatel
n3:idSjednocenehoVysledku
628351
n3:idVysledku
RIV/00216305:26220/03:PU38696
n3:jazykVysledku
n20:eng
n3:klicovaSlova
gas sensors, r.f. sputtering, screen-printing, micromachined array, quantitative gas analysis
n3:klicoveSlovo
n4:gas%20sensors n4:quantitative%20gas%20analysis n4:r.f.%20sputtering n4:micromachined%20array n4:screen-printing
n3:kontrolniKodProRIV
[B9E85207B996]
n3:mistoKonaniAkce
Brno
n3:mistoVydani
Brno
n3:nazevZdroje
10th Electronic devices and Systems Conference 2003
n3:obor
n9:JA
n3:pocetDomacichTvurcuVysledku
2
n3:pocetTvurcuVysledku
5
n3:pocetUcastnikuAkce
0
n3:pocetZahranicnichUcastnikuAkce
0
n3:rokUplatneniVysledku
n7:2003
n3:tvurceVysledku
Hubálek, Jaromír Malysz, Karel
n3:typAkce
n19:WRD
n3:zahajeniAkce
2003-09-09+02:00
n3:zamer
n17:MSM%20262200022
s:numberOfPages
4
n18:hasPublisher
Ing. Zdeněk Novotný CSc.
n14:isbn
80-214-2452-4
n21:organizacniJednotka
26220