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Statements

Subject Item
n2:RIV%2F00216305%3A26220%2F02%3APU30455%21RIV%2F2003%2FMSM%2F262203%2FN
rdf:type
n19:Vysledek skos:Concept
dcterms:description
The enormous power of today`s computers has enabled the TCAD (Technology CAD) to become a workhorse of microelectronics progress. The development of sophisticated and efficient one-, two- and three-dimensional semiconductor process and device software tools will provide the engineers significant leverage in conducting research into new areas of IC technologies. The contribution reviews process and device simulation tools in common use and deals with the required features of the new TCAD tools generaation. The enormous power of today`s computers has enabled the TCAD (Technology CAD) to become a workhorse of microelectronics progress. The development of sophisticated and efficient one-, two- and three-dimensional semiconductor process and device software tools will provide the engineers significant leverage in conducting research into new areas of IC technologies. The contribution reviews process and device simulation tools in common use and deals with the required features of the new TCAD tools generaation.
dcterms:title
TCAD tools in process and device simulation TCAD tools in process and device simulation
skos:prefLabel
TCAD tools in process and device simulation TCAD tools in process and device simulation
skos:notation
RIV/00216305:26220/02:PU30455!RIV/2003/MSM/262203/N
n3:strany
187-192
n3:aktivita
n17:Z
n3:aktivity
Z(MSM 262200022)
n3:dodaniDat
n10:2003
n3:domaciTvurceVysledku
n9:5498228
n3:druhVysledku
n7:D
n3:duvernostUdaju
n20:S
n3:entitaPredkladatele
n16:predkladatel
n3:idSjednocenehoVysledku
666384
n3:idVysledku
RIV/00216305:26220/02:PU30455
n3:jazykVysledku
n8:eng
n3:klicovaSlova
TCAD, process simulation, device simulation,
n3:klicoveSlovo
n4:process%20simulation n4:device%20simulation n4:TCAD
n3:kontrolniKodProRIV
[1B37FF8A1167]
n3:mistoKonaniAkce
Brno
n3:mistoVydani
Brno
n3:nazevZdroje
Electronics Devices and Systems EDS02. Proceedings.
n3:obor
n14:JA
n3:pocetDomacichTvurcuVysledku
1
n3:pocetTvurcuVysledku
1
n3:pocetUcastnikuAkce
0
n3:pocetZahranicnichUcastnikuAkce
0
n3:rokUplatneniVysledku
n10:2002
n3:tvurceVysledku
Recman, Milan
n3:typAkce
n6:EUR
n3:zahajeniAkce
2002-09-09+02:00
n3:zamer
n18:MSM%20262200022
s:numberOfPages
6
n11:hasPublisher
Ing. Zdeněk Novotný CSc.
n13:isbn
80-214-2180-0
n21:organizacniJednotka
26220