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Statements

Subject Item
n2:RIV%2F00216305%3A26210%2F11%3APU95284%21RIV12-MSM-26210___
rdf:type
skos:Concept n15:Vysledek
dcterms:description
Two modern experimental techniques, the focused ion beam milling and the nanoindentation, were applied in order to measure exactly plastic properties of a Al-1.5%Cu thin film prepared by the physical vapour deposition, used for electrical connection of integrated circuits. By focused ion beam milling, cylindrical specimens were prepared. The height of the specimens was equal to the film thickness (2 micrometers) and their diameter was about 1.3 micrometers. These specimens were subjected to the compressive loading using the nanoindenter equipped by a flat punch. It is possible to obtain stress-strain curves of the thin film rather precisely. Two modern experimental techniques, the focused ion beam milling and the nanoindentation, were applied in order to measure exactly plastic properties of a Al-1.5%Cu thin film prepared by the physical vapour deposition, used for electrical connection of integrated circuits. By focused ion beam milling, cylindrical specimens were prepared. The height of the specimens was equal to the film thickness (2 micrometers) and their diameter was about 1.3 micrometers. These specimens were subjected to the compressive loading using the nanoindenter equipped by a flat punch. It is possible to obtain stress-strain curves of the thin film rather precisely.
dcterms:title
Mechanical properties of Al thin film measured by microcompression Mechanical properties of Al thin film measured by microcompression
skos:prefLabel
Mechanical properties of Al thin film measured by microcompression Mechanical properties of Al thin film measured by microcompression
skos:notation
RIV/00216305:26210/11:PU95284!RIV12-MSM-26210___
n15:predkladatel
n16:orjk%3A26210
n4:aktivita
n13:S
n4:aktivity
S
n4:dodaniDat
n18:2012
n4:domaciTvurceVysledku
n5:5413206
n4:druhVysledku
n6:D
n4:duvernostUdaju
n17:S
n4:entitaPredkladatele
n8:predkladatel
n4:idSjednocenehoVysledku
211232
n4:idVysledku
RIV/00216305:26210/11:PU95284
n4:jazykVysledku
n9:eng
n4:klicovaSlova
focused ion beam, pillars, Al thin film, nanoindenter
n4:klicoveSlovo
n12:Al%20thin%20film n12:pillars n12:nanoindenter n12:focused%20ion%20beam
n4:kontrolniKodProRIV
[FADA34080824]
n4:mistoKonaniAkce
Velké Bílovice
n4:mistoVydani
Neuveden
n4:nazevZdroje
Applied mechanics 2011
n4:obor
n14:JR
n4:pocetDomacichTvurcuVysledku
1
n4:pocetTvurcuVysledku
2
n4:rokUplatneniVysledku
n18:2011
n4:tvurceVysledku
Kruml, Tomáš Kuběna, Ivo
n4:typAkce
n7:EUR
n4:zahajeniAkce
2011-04-18+02:00
s:numberOfPages
4
n21:hasPublisher
Neuveden
n11:isbn
978-80-87434-03-1
n20:organizacniJednotka
26210