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Statements

Subject Item
n2:RIV%2F00216305%3A26210%2F07%3APU67845%21RIV07-GA0-26210___
rdf:type
n7:Vysledek skos:Concept
dcterms:description
Analýza tenkých vrstev pomocí ToF-LEIS In the paper the design and application of a TOF-LEIS instrument built into an UHV complex deposition and analytical apparatus is described. A special attention is aimed at demonstrating the ability of TOF-LEIS to analyse near-to-surface layers of thin films prepared both ex-situ and in-situ. Additionally, the monitoring of diffusion processes close to a sample surface by this technique is presented. It is shown that the broadening of peaks in TOF-LEIS spectra can be attributed to multiple scattering and inelastic losses of ions in deeper layers. As a result of that, the peak width of ultrathin films depends on their thickness. In the paper the design and application of a TOF-LEIS instrument built into an UHV complex deposition and analytical apparatus is described. A special attention is aimed at demonstrating the ability of TOF-LEIS to analyse near-to-surface layers of thin films prepared both ex-situ and in-situ. Additionally, the monitoring of diffusion processes close to a sample surface by this technique is presented. It is shown that the broadening of peaks in TOF-LEIS spectra can be attributed to multiple scattering and inelastic losses of ions in deeper layers. As a result of that, the peak width of ultrathin films depends on their thickness.
dcterms:title
Analysis of thin films by TOF-LEIS Analysis of thin films by TOF-LEIS Analýza tenkých vrstev pomocí ToF-LEIS
skos:prefLabel
Analysis of thin films by TOF-LEIS Analysis of thin films by TOF-LEIS Analýza tenkých vrstev pomocí ToF-LEIS
skos:notation
RIV/00216305:26210/07:PU67845!RIV07-GA0-26210___
n3:strany
335-341
n3:aktivita
n5:Z n5:P
n3:aktivity
P(GP202/05/P288), P(IAA1010413), P(LC06040), Z(MSM0021630508)
n3:cisloPeriodika
3
n3:dodaniDat
n18:2007
n3:domaciTvurceVysledku
n4:6136168 n4:9597719 n4:2404214 n4:9639195 n4:6804233
n3:druhVysledku
n12:J
n3:duvernostUdaju
n16:S
n3:entitaPredkladatele
n17:predkladatel
n3:idSjednocenehoVysledku
409574
n3:idVysledku
RIV/00216305:26210/07:PU67845
n3:jazykVysledku
n9:eng
n3:klicovaSlova
Time of Flight, TOF, Low energy, Ion Scattering, LEIS, Surfaces
n3:klicoveSlovo
n10:Time%20of%20Flight n10:Surfaces n10:TOF n10:Low%20energy n10:LEIS n10:Ion%20Scattering
n3:kodStatuVydavatele
PL - Polská republika
n3:kontrolniKodProRIV
[1CD8347049A5]
n3:nazevZdroje
Acta Physica Polonica A
n3:obor
n14:BM
n3:pocetDomacichTvurcuVysledku
5
n3:pocetTvurcuVysledku
5
n3:projekt
n8:GP202%2F05%2FP288 n8:IAA1010413 n8:LC06040
n3:rokUplatneniVysledku
n18:2007
n3:svazekPeriodika
111
n3:tvurceVysledku
Mach, Jindřich Kolíbal, Miroslav Bábor, Petr Průša, Stanislav Šikola, Tomáš
n3:zamer
n19:MSM0021630508
s:issn
0587-4246
s:numberOfPages
7
n13:organizacniJednotka
26210