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Statements

Subject Item
n2:RIV%2F00216305%3A26210%2F01%3APU23138%21RIV11-MSM-26210___
rdf:type
skos:Concept n16:Vysledek
dcterms:description
In the paper AFM studies of microstructures etched by ion beams into Si and Au surfaces, and AFM local anodic oxidation of Ti thin films is presented. Using the AFM technique the etching limits of inert atoms in production of silicon and silver grids were found. It was proved that the height of Ti oxide lines fabricated by AFM increases linearly with the voltage between a tip and a sample. On the other hand, the half-width of the lines did not depend linearly on this voltage. The results are useful for studies of quantum effects in nanostructures and experiments in fabrication of nanoelectronic devices (e.g. SET). In the paper AFM studies of microstructures etched by ion beams into Si and Au surfaces, and AFM local anodic oxidation of Ti thin films is presented. Using the AFM technique the etching limits of inert atoms in production of silicon and silver grids were found. It was proved that the height of Ti oxide lines fabricated by AFM increases linearly with the voltage between a tip and a sample. On the other hand, the half-width of the lines did not depend linearly on this voltage. The results are useful for studies of quantum effects in nanostructures and experiments in fabrication of nanoelectronic devices (e.g. SET).
dcterms:title
Fabrication of nanostructures by AFM local Oxidation Fabrication of nanostructures by AFM local Oxidation
skos:prefLabel
Fabrication of nanostructures by AFM local Oxidation Fabrication of nanostructures by AFM local Oxidation
skos:notation
RIV/00216305:26210/01:PU23138!RIV11-MSM-26210___
n3:aktivita
n5:V n5:Z n5:P
n3:aktivity
P(ME 480), P(PG98377), V, Z(MSM 262100002)
n3:dodaniDat
n6:2011
n3:domaciTvurceVysledku
n19:4408039 n19:6804233 n19:7163185
n3:druhVysledku
n15:D
n3:duvernostUdaju
n22:S
n3:entitaPredkladatele
n18:predkladatel
n3:idSjednocenehoVysledku
680159
n3:idVysledku
RIV/00216305:26210/01:PU23138
n3:jazykVysledku
n11:eng
n3:klicovaSlova
AFM fabrication, local anodic oxidation, oxide nanostructures
n3:klicoveSlovo
n7:AFM%20fabrication n7:oxide%20nanostructures n7:local%20anodic%20oxidation
n3:kontrolniKodProRIV
[DF00AEA7DDE2]
n3:mistoKonaniAkce
Brno, FEI VUT
n3:mistoVydani
Brno
n3:nazevZdroje
Sborník příspěvků konference Nové trendy ve fyzice
n3:obor
n13:BM
n3:pocetDomacichTvurcuVysledku
3
n3:pocetTvurcuVysledku
3
n3:projekt
n12:PG98377 n12:ME%20480
n3:rokUplatneniVysledku
n6:2001
n3:tvurceVysledku
Škoda, David Šikola, Tomáš Lopour, Filip
n3:typAkce
n17:EUR
n3:zahajeniAkce
2001-11-15+01:00
n3:zamer
n20:MSM%20262100002
s:numberOfPages
6
n9:hasPublisher
Vysoké učení technické v Brně. Fakulta elektrotechniky a informatiky
n14:isbn
80-214-1992-X
n21:organizacniJednotka
26210