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Statements

Subject Item
n2:RIV%2F00216305%3A26210%2F00%3A00000265%21RIV%2F2001%2FMSM%2F262101%2FN
rdf:type
n9:Vysledek skos:Concept
dcterms:description
The etching ability of low energy Ar ions to produce microstructures in Si and Ag substrates and to modify surfaces of refractory materials like ceramics was proved. The microstructures with pattern heights up to 90 nm (Si) and 300 nm (Ag) were created. Despite relatively low energies of ions, interesting significant ion-beam induced modifications of alumina surfaces were found. The etching ability of low energy Ar ions to produce microstructures in Si and Ag substrates and to modify surfaces of refractory materials like ceramics was proved. The microstructures with pattern heights up to 90 nm (Si) and 300 nm (Ag) were created. Despite relatively low energies of ions, interesting significant ion-beam induced modifications of alumina surfaces were found.
dcterms:title
Etching of Microstructures and Modification of Solid Surfaces by Low Energy Ion Beams Etching of Microstructures and Modification of Solid Surfaces by Low Energy Ion Beams
skos:prefLabel
Etching of Microstructures and Modification of Solid Surfaces by Low Energy Ion Beams Etching of Microstructures and Modification of Solid Surfaces by Low Energy Ion Beams
skos:notation
RIV/00216305:26210/00:00000265!RIV/2001/MSM/262101/N
n3:strany
919
n3:aktivita
n15:Z
n3:aktivity
Z(MSM 262100002)
n3:dodaniDat
n4:2001
n3:domaciTvurceVysledku
Spousta, Jiří Bábor, Petr Lopour, Filip Šikola, Tomáš Dittrichová, Libuše
n3:druhVysledku
n19:D
n3:duvernostUdaju
n11:S
n3:entitaPredkladatele
n12:predkladatel
n3:idSjednocenehoVysledku
710543
n3:idVysledku
RIV/00216305:26210/00:00000265
n3:jazykVysledku
n18:eng
n3:klicovaSlova
Low Energy Ion Beams; Etching; Modification; Microstructures; Ceramics;
n3:klicoveSlovo
n7:Modification n7:Low%20Energy%20Ion%20Beams n7:Etching n7:Microstructures n7:Ceramics
n3:kontrolniKodProRIV
[62DB461CBC43]
n3:mistoVydani
Berlín, SNR
n3:nazevZdroje
Micro Materials - Micro Mat 2000, Berlin
n3:obor
n6:BM
n3:pocetDomacichTvurcuVysledku
5
n3:pocetTvurcuVysledku
7
n3:rokUplatneniVysledku
n4:2000
n3:tvurceVysledku
Matějka, František Bábor, Petr Duarte, Juan Lopour, Filip Spousta, Jiří Dittrichová, Libuše Šikola, Tomáš
n3:zamer
n16:MSM%20262100002
s:numberOfPages
4
n14:hasPublisher
Micro Materials - Micro Mat 2000, Berlin
n10:isbn
3-932434-15-3
n17:organizacniJednotka
26210