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Statements

Subject Item
n2:RIV%2F00216305%3A26110%2F14%3APU112356%21RIV15-MSM-26110___
rdf:type
n15:Vysledek skos:Concept
dcterms:description
The presented work describes a finite element method based modeling of a conductive AFM measurement process. The C-AFM is a scanning probe microscopy technique for mapping electrical properties of a sample together with its topography. The contact resistance between the probe and the rough surface is modeled in two steps - first the problem of mechanical deformation is solved and then the electrical field, and current, is found. The geometry of the model comes from a real sample topography measured using AFM. The whole multiphysics 3D simulation is done for each data point, which makes the problem possible to be solved only using a supercomputer with many simplifications and optimizations. The presented work describes a finite element method based modeling of a conductive AFM measurement process. The C-AFM is a scanning probe microscopy technique for mapping electrical properties of a sample together with its topography. The contact resistance between the probe and the rough surface is modeled in two steps - first the problem of mechanical deformation is solved and then the electrical field, and current, is found. The geometry of the model comes from a real sample topography measured using AFM. The whole multiphysics 3D simulation is done for each data point, which makes the problem possible to be solved only using a supercomputer with many simplifications and optimizations.
dcterms:title
Modeling C-AFM measurement using FEM Modeling C-AFM measurement using FEM
skos:prefLabel
Modeling C-AFM measurement using FEM Modeling C-AFM measurement using FEM
skos:notation
RIV/00216305:26110/14:PU112356!RIV15-MSM-26110___
n3:aktivita
n4:S
n3:aktivity
S
n3:dodaniDat
n5:2015
n3:domaciTvurceVysledku
n6:5243025 n6:2260387
n3:druhVysledku
n16:D
n3:duvernostUdaju
n11:S
n3:entitaPredkladatele
n13:predkladatel
n3:idSjednocenehoVysledku
29793
n3:idVysledku
RIV/00216305:26110/14:PU112356
n3:jazykVysledku
n18:eng
n3:klicovaSlova
conductive AFM, finite element method, fem
n3:klicoveSlovo
n8:finite%20element%20method n8:fem n8:conductive%20AFM
n3:kontrolniKodProRIV
[3331607D6C34]
n3:mistoKonaniAkce
Brno
n3:mistoVydani
Neuveden
n3:nazevZdroje
Nanocon 2014
n3:obor
n10:JB
n3:pocetDomacichTvurcuVysledku
2
n3:pocetTvurcuVysledku
3
n3:rokUplatneniVysledku
n5:2014
n3:tvurceVysledku
Klapetek, Petr Šlesinger, Radek Martinek, Jan
n3:typAkce
n14:WRD
n3:zahajeniAkce
2014-11-05+01:00
s:numberOfPages
6
n19:hasPublisher
Neuveden
n17:isbn
978-80-87294-55-0
n20:organizacniJednotka
26110