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Statements

Subject Item
n2:RIV%2F00216275%3A25310%2F12%3A39896002%21RIV13-MSM-25310___
rdf:type
skos:Concept n6:Vysledek
dcterms:description
Soft imprint lithography using a PDMS mould [1] has been shown as an effective and straightforward method for micro- and nano-patterning of the surfaces of chalcogenide glass films [2]. Here, micrometre-scale (width ~4mým and depth ~0.8 mým) test patterns such as ribs, channels and a lens array were successfully imprinted into the surface of high refractive index As3S7 bulk glass at 225°C without any applied external pressure. The mean-square roughness of the patterned glass surface is in the range 3 - 10 nm [3]. Using commercially available nano-imprinters, soft imprinting of bulk chalcogenide glasses shows great promise for the reproducible fabrication of optical and photonic devices over large surface areas. The high refractive index of chalcogenide glasses could be exploited in the design and fabrication of diffractive optical elements for the infrared region, e.g. for filtering light of selected spectral range or patterning of anti-reflection surfaces as lens arrays with optical properties tuned at any particular wavelength. Further refinement of the patterns down to nanometre scale is expected to be useful in other applications; examples include 2D-photonic crystals or devices based on a photonic crystal architecture, e.g. sensors operating in the visible and infrared spectral range and elements based on an optical non-linearity, surface-enhanced effects or evanescent light generation. The authors thank to grant project CZ.1.07/2.3.00/09.0104 %22TEAM CMS%22 realized by European Social Fund and Ministry of Education, Youth and Sports of The Czech Republic within The Education for Competitiveness Operational Programme for financial support. Soft imprint lithography using a PDMS mould [1] has been shown as an effective and straightforward method for micro- and nano-patterning of the surfaces of chalcogenide glass films [2]. Here, micrometre-scale (width ~4mým and depth ~0.8 mým) test patterns such as ribs, channels and a lens array were successfully imprinted into the surface of high refractive index As3S7 bulk glass at 225°C without any applied external pressure. The mean-square roughness of the patterned glass surface is in the range 3 - 10 nm [3]. Using commercially available nano-imprinters, soft imprinting of bulk chalcogenide glasses shows great promise for the reproducible fabrication of optical and photonic devices over large surface areas. The high refractive index of chalcogenide glasses could be exploited in the design and fabrication of diffractive optical elements for the infrared region, e.g. for filtering light of selected spectral range or patterning of anti-reflection surfaces as lens arrays with optical properties tuned at any particular wavelength. Further refinement of the patterns down to nanometre scale is expected to be useful in other applications; examples include 2D-photonic crystals or devices based on a photonic crystal architecture, e.g. sensors operating in the visible and infrared spectral range and elements based on an optical non-linearity, surface-enhanced effects or evanescent light generation. The authors thank to grant project CZ.1.07/2.3.00/09.0104 %22TEAM CMS%22 realized by European Social Fund and Ministry of Education, Youth and Sports of The Czech Republic within The Education for Competitiveness Operational Programme for financial support.
dcterms:title
Soft Imprint Lithography of a Bulk Chalcogenide Glass Soft Imprint Lithography of a Bulk Chalcogenide Glass
skos:prefLabel
Soft Imprint Lithography of a Bulk Chalcogenide Glass Soft Imprint Lithography of a Bulk Chalcogenide Glass
skos:notation
RIV/00216275:25310/12:39896002!RIV13-MSM-25310___
n6:predkladatel
n13:orjk%3A25310
n5:aktivita
n8:P
n5:aktivity
P(EE2.3.09.0104), P(EE2.3.20.0254)
n5:dodaniDat
n9:2013
n5:domaciTvurceVysledku
n14:6649440
n5:druhVysledku
n17:O
n5:duvernostUdaju
n11:S
n5:entitaPredkladatele
n10:predkladatel
n5:idSjednocenehoVysledku
168898
n5:idVysledku
RIV/00216275:25310/12:39896002
n5:jazykVysledku
n15:eng
n5:klicovaSlova
chalcogenide glass; Soft imprint lithography
n5:klicoveSlovo
n7:chalcogenide%20glass n7:Soft%20imprint%20lithography
n5:kontrolniKodProRIV
[8E1706ADF834]
n5:obor
n12:CA
n5:pocetDomacichTvurcuVysledku
1
n5:pocetTvurcuVysledku
4
n5:projekt
n16:EE2.3.20.0254 n16:EE2.3.09.0104
n5:rokUplatneniVysledku
n9:2012
n5:tvurceVysledku
Kohoutek, Tomáš
n18:organizacniJednotka
25310