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Statements

Subject Item
n2:RIV%2F00216275%3A25310%2F04%3A00001378%21RIV%2F2005%2FMSM%2F253105%2FN
rdf:type
n12:Vysledek skos:Concept
dcterms:description
Byly spřipraveny a charakterizovány amorfní tenké filmy As40S60 a As40Se60 připravených metodou plasma-enhanced CVD Amorphous chalcogenide films of chemical compositions As40S60 and As40Se60 have been prepared by plasma-enhanced chemical vapor deposition.An improved optical characterization method suitable for non-uniform thin films, which also takes into consideration the weak absorption in the substrate, has successfully been applied.The values of the average thickness and thickness variation, d and Dd, respectively, were crossed-checked with those measured by use of a surface-profiling stylus instrument, and differences between the directly measured and the optically calculated values were, in all cases, less than 2%.A comparison between the structural and optical properties of these PECVD films, and those of the same chemical composition prepared by thermal evaporation, is systematically made in this paper. Amorphous chalcogenide films of chemical compositions As40S60 and As40Se60 have been prepared by plasma-enhanced chemical vapor deposition.An improved optical characterization method suitable for non-uniform thin films, which also takes into consideration the weak absorption in the substrate, has successfully been applied.The values of the average thickness and thickness variation, d and Dd, respectively, were crossed-checked with those measured by use of a surface-profiling stylus instrument, and differences between the directly measured and the optically calculated values were, in all cases, less than 2%.A comparison between the structural and optical properties of these PECVD films, and those of the same chemical composition prepared by thermal evaporation, is systematically made in this paper.
dcterms:title
Structural and optical characterization of amorphous As40S60 and As40Se60 films prepared by plasma-enhanced chemical vapor deposition Strukturní a optická charakterizace amorfních tenkých filmů As40S60 a As40Se60 připravených metodou CVD Structural and optical characterization of amorphous As40S60 and As40Se60 films prepared by plasma-enhanced chemical vapor deposition
skos:prefLabel
Strukturní a optická charakterizace amorfních tenkých filmů As40S60 a As40Se60 připravených metodou CVD Structural and optical characterization of amorphous As40S60 and As40Se60 films prepared by plasma-enhanced chemical vapor deposition Structural and optical characterization of amorphous As40S60 and As40Se60 films prepared by plasma-enhanced chemical vapor deposition
skos:notation
RIV/00216275:25310/04:00001378!RIV/2005/MSM/253105/N
n3:strany
88-92
n3:aktivita
n11:Z
n3:aktivity
Z(MSM 253100001)
n3:cisloPeriodika
345&34
n3:dodaniDat
n14:2005
n3:domaciTvurceVysledku
n10:1620290
n3:druhVysledku
n7:J
n3:duvernostUdaju
n9:S
n3:entitaPredkladatele
n18:predkladatel
n3:idSjednocenehoVysledku
588446
n3:idVysledku
RIV/00216275:25310/04:00001378
n3:jazykVysledku
n17:eng
n3:klicovaSlova
amorphous chalcogenide films;PECVD;
n3:klicoveSlovo
n4:amorphous%20chalcogenide%20films n4:PECVD
n3:kodStatuVydavatele
NL - Nizozemsko
n3:kontrolniKodProRIV
[507992BD3C77]
n3:nazevZdroje
Journal of Non-Crystalline Solids
n3:obor
n16:CA
n3:pocetDomacichTvurcuVysledku
1
n3:pocetTvurcuVysledku
4
n3:rokUplatneniVysledku
n14:2004
n3:svazekPeriodika
Neuveden
n3:tvurceVysledku
Márquer, E. Vlček, Miroslav Prieto-Alcón, R. González-Leal, J. M.
n3:zamer
n15:MSM%20253100001
s:issn
0022-3093
s:numberOfPages
5
n6:organizacniJednotka
25310