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Statements

Subject Item
n2:RIV%2F00216275%3A25310%2F04%3A00001377%21RIV08-MSM-25310___
rdf:type
n9:Vysledek skos:Concept
dcterms:description
Byla studována drsnost povrchu a index lomu amorfních filmů As40S60 připravených metodou %22spin coating%22 An envelope method, based on the optical reection spectrum taken at normal incidence, has been successfully applied to the geometrical?optical characterization of thin dielectric lms having signicant surface roughness. Such a method allows the determination of the average thickness and the refractive index of the lms with accuracies better than 1%, as well as the average amplitude of the surface roughness with an accuracy of about 2%. Amorphous As40S60 thin lms have been deposited by spin coating, onto glass substrates, from a solution of the bulk material in n-propylamine. Indications of the surface roughness in these lms were found from total (specular plus diuse) reectance measurements using an integrating sphere, and also from mechanical measurements using a stylus proler. The latter technique provided a value for the average surface roughness of 20 ? 4 nm, which is in excellent agreement with the optically determined value of 17.4? 0.4 nm. An envelope method, based on the optical reection spectrum taken at normal incidence, has been successfully applied to the geometrical?optical characterization of thin dielectric lms having signicant surface roughness. Such a method allows the determination of the average thickness and the refractive index of the lms with accuracies better than 1%, as well as the average amplitude of the surface roughness with an accuracy of about 2%. Amorphous As40S60 thin lms have been deposited by spin coating, onto glass substrates, from a solution of the bulk material in n-propylamine. Indications of the surface roughness in these lms were found from total (specular plus diuse) reectance measurements using an integrating sphere, and also from mechanical measurements using a stylus proler. The latter technique provided a value for the average surface roughness of 20 ? 4 nm, which is in excellent agreement with the optically determined value of 17.4? 0.4 nm.
dcterms:title
Určení drsnosti povrchu a indexu lomu amorfních filmů As40S60 připravených metodou %22spin coating%22 Determination of the surface roughness and refractive index of amorphous As40S60 lms deposited by spin coating Determination of the surface roughness and refractive index of amorphous As40S60 lms deposited by spin coating
skos:prefLabel
Určení drsnosti povrchu a indexu lomu amorfních filmů As40S60 připravených metodou %22spin coating%22 Determination of the surface roughness and refractive index of amorphous As40S60 lms deposited by spin coating Determination of the surface roughness and refractive index of amorphous As40S60 lms deposited by spin coating
skos:notation
RIV/00216275:25310/04:00001377!RIV08-MSM-25310___
n3:strany
147-154
n3:aktivita
n11:Z
n3:aktivity
Z(MSM 253100001)
n3:cisloPeriodika
27
n3:dodaniDat
n14:2008
n3:domaciTvurceVysledku
n17:1620290
n3:druhVysledku
n18:J
n3:duvernostUdaju
n5:S
n3:entitaPredkladatele
n8:predkladatel
n3:idSjednocenehoVysledku
560132
n3:idVysledku
RIV/00216275:25310/04:00001377
n3:jazykVysledku
n13:eng
n3:klicovaSlova
refraction index; surface roughness; amorphous films
n3:klicoveSlovo
n6:amorphous%20films n6:refraction%20index n6:surface%20roughness
n3:kodStatuVydavatele
NL - Nizozemsko
n3:kontrolniKodProRIV
[3BE18F5C6D82]
n3:nazevZdroje
Optical Materials
n3:obor
n12:CA
n3:pocetDomacichTvurcuVysledku
1
n3:pocetTvurcuVysledku
6
n3:rokUplatneniVysledku
n14:2004
n3:svazekPeriodika
N
n3:tvurceVysledku
Vlček, Miroslav Stuchlík, Marek González-Leal, J. M. Márquez, E. Elliott, S. R. Prieto-Alcon, R.
n3:zamer
n4:MSM%20253100001
s:issn
0925-3467
s:numberOfPages
8
n16:organizacniJednotka
25310