This HTML5 document contains 45 embedded RDF statements represented using HTML+Microdata notation.

The embedded RDF content will be recognized by any processor of HTML5 Microdata.

Namespace Prefixes

PrefixIRI
n14http://linked.opendata.cz/ontology/domain/vavai/riv/typAkce/
dctermshttp://purl.org/dc/terms/
n20http://localhost/temp/predkladatel/
n5http://purl.org/net/nknouf/ns/bibtex#
n12http://linked.opendata.cz/resource/domain/vavai/riv/tvurce/
n10http://linked.opendata.cz/resource/domain/vavai/projekt/
n19http://linked.opendata.cz/resource/domain/vavai/subjekt/
n11http://linked.opendata.cz/ontology/domain/vavai/
n22https://schema.org/
shttp://schema.org/
skoshttp://www.w3.org/2004/02/skos/core#
n3http://linked.opendata.cz/ontology/domain/vavai/riv/
n2http://linked.opendata.cz/resource/domain/vavai/vysledek/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
n15http://linked.opendata.cz/resource/domain/vavai/vysledek/RIV%2F00216224%3A14310%2F13%3A00066351%21RIV14-MSM-14310___/
n4http://linked.opendata.cz/ontology/domain/vavai/riv/klicoveSlovo/
n6http://linked.opendata.cz/ontology/domain/vavai/riv/duvernostUdaju/
xsdhhttp://www.w3.org/2001/XMLSchema#
n18http://linked.opendata.cz/ontology/domain/vavai/riv/aktivita/
n16http://linked.opendata.cz/ontology/domain/vavai/riv/jazykVysledku/
n21http://linked.opendata.cz/ontology/domain/vavai/riv/obor/
n17http://linked.opendata.cz/ontology/domain/vavai/riv/druhVysledku/
n9http://reference.data.gov.uk/id/gregorian-year/

Statements

Subject Item
n2:RIV%2F00216224%3A14310%2F13%3A00066351%21RIV14-MSM-14310___
rdf:type
n11:Vysledek skos:Concept
dcterms:description
High power impulse magnetron sputtering (HiPIMS) is nowadays often discussed topic. Physics of HiPIMS discharge is not completely understand yet. Even very basic characteristics of HiPIMS discharge like time resolved dependence of the cathode voltage and the discharge current are still discussed and interpreted. This research shows different regimes of time evolution of the discharge current depending on applied target voltage. Possible interpretation is presented. High power impulse magnetron sputtering (HiPIMS) is nowadays often discussed topic. Physics of HiPIMS discharge is not completely understand yet. Even very basic characteristics of HiPIMS discharge like time resolved dependence of the cathode voltage and the discharge current are still discussed and interpreted. This research shows different regimes of time evolution of the discharge current depending on applied target voltage. Possible interpretation is presented.
dcterms:title
Evolution of discharge current in high power impulse magnetron sputtering Evolution of discharge current in high power impulse magnetron sputtering
skos:prefLabel
Evolution of discharge current in high power impulse magnetron sputtering Evolution of discharge current in high power impulse magnetron sputtering
skos:notation
RIV/00216224:14310/13:00066351!RIV14-MSM-14310___
n11:predkladatel
n19:orjk%3A14310
n3:aktivita
n18:P
n3:aktivity
P(ED2.1.00/03.0086), P(GAP205/12/0407)
n3:dodaniDat
n9:2014
n3:domaciTvurceVysledku
n12:1504088 n12:1443712
n3:druhVysledku
n17:D
n3:duvernostUdaju
n6:S
n3:entitaPredkladatele
n15:predkladatel
n3:idSjednocenehoVysledku
73794
n3:idVysledku
RIV/00216224:14310/13:00066351
n3:jazykVysledku
n16:eng
n3:klicovaSlova
HiPIMS; discharge current; magnetron sputtering; optical emission spectroscopy
n3:klicoveSlovo
n4:HiPIMS n4:magnetron%20sputtering n4:discharge%20current n4:optical%20emission%20spectroscopy
n3:kontrolniKodProRIV
[F5CF66DF603B]
n3:mistoKonaniAkce
Liberec
n3:mistoVydani
Liberec
n3:nazevZdroje
PAPN 2013: Book of extended abstracts
n3:obor
n21:BL
n3:pocetDomacichTvurcuVysledku
2
n3:pocetTvurcuVysledku
3
n3:projekt
n10:ED2.1.00%2F03.0086 n10:GAP205%2F12%2F0407
n3:rokUplatneniVysledku
n9:2013
n3:tvurceVysledku
Fekete, Matej Klein, Peter Vašina, Petr
n3:typAkce
n14:EUR
n3:zahajeniAkce
2013-01-01+01:00
s:numberOfPages
2
n5:hasPublisher
Technická univerzita v Liberci
n22:isbn
9788073729882
n20:organizacniJednotka
14310