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Statements

Subject Item
n2:RIV%2F00216224%3A14310%2F13%3A00066337%21RIV14-MSM-14310___
rdf:type
skos:Concept n3:Vysledek
dcterms:description
It is commonly observed that thin layers, especially formed by compound material deposited in planar magnetron using the same deposition manners, can have slightly different properties and composition. This research shows that one of the important factors to be considered thinking about fluxes of different species on the substrate is the target erosion state. Using Monte Carlo simulation optimal conditions for reproducibly depositing thin layer were calculated. It is commonly observed that thin layers, especially formed by compound material deposited in planar magnetron using the same deposition manners, can have slightly different properties and composition. This research shows that one of the important factors to be considered thinking about fluxes of different species on the substrate is the target erosion state. Using Monte Carlo simulation optimal conditions for reproducibly depositing thin layer were calculated.
dcterms:title
On sputtered particle distribution towards substrate during target erosion - simulation and experiment On sputtered particle distribution towards substrate during target erosion - simulation and experiment
skos:prefLabel
On sputtered particle distribution towards substrate during target erosion - simulation and experiment On sputtered particle distribution towards substrate during target erosion - simulation and experiment
skos:notation
RIV/00216224:14310/13:00066337!RIV14-MSM-14310___
n3:predkladatel
n4:orjk%3A14310
n5:aktivita
n16:P
n5:aktivity
P(ED2.1.00/03.0086), P(GAP205/12/0407)
n5:dodaniDat
n9:2014
n5:domaciTvurceVysledku
n13:1504088 n13:7247664 n13:3589730
n5:druhVysledku
n7:D
n5:duvernostUdaju
n18:S
n5:entitaPredkladatele
n6:predkladatel
n5:idSjednocenehoVysledku
93811
n5:idVysledku
RIV/00216224:14310/13:00066337
n5:jazykVysledku
n12:eng
n5:klicovaSlova
Sputtering; Magnetron; Monte Carlo simulation; Compound material
n5:klicoveSlovo
n10:Magnetron n10:Sputtering n10:Compound%20material n10:Monte%20Carlo%20simulation
n5:kontrolniKodProRIV
[EA0F3344A398]
n5:mistoKonaniAkce
Liberec
n5:mistoVydani
Liberec
n5:nazevZdroje
PAPN 2013: Book of extended abstracts
n5:obor
n19:BL
n5:pocetDomacichTvurcuVysledku
3
n5:pocetTvurcuVysledku
3
n5:projekt
n20:ED2.1.00%2F03.0086 n20:GAP205%2F12%2F0407
n5:rokUplatneniVysledku
n9:2013
n5:tvurceVysledku
Schmidtová, Tereza Vašina, Petr Klein, Peter
n5:typAkce
n22:EUR
n5:zahajeniAkce
2013-01-01+01:00
s:numberOfPages
3
n15:hasPublisher
Technická univerzita v Liberci
n21:isbn
9788073729882
n17:organizacniJednotka
14310