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Statements

Subject Item
n2:RIV%2F00216224%3A14310%2F12%3A00057404%21RIV13-GA0-14310___
rdf:type
skos:Concept n12:Vysledek
dcterms:description
In this paper we present study of the dc discharge in the cylindrical magnetron device. The working gas was neon, the typical working pressure range was of 2-10 Pa and discharge current was set up in the range of 100-250 mA. Measurements were performed in the neon weakly magnetized dc plasma using the radial movable cylindrical Langmuire probe. From probe characteristics, radial dependences of plasma parameters (plasma potential, floating potential, electron density) were obtained. Optical emission spectroscopy accompanied with a method of effective branching fractions (EBF) was used to determine neon 1s3 and 1s5 metastable state densities from transitions 2p5 3p - 2p5 3s. The determined density of 1s5 metastable state was 2.2x10^10 cm-3. In this paper we present study of the dc discharge in the cylindrical magnetron device. The working gas was neon, the typical working pressure range was of 2-10 Pa and discharge current was set up in the range of 100-250 mA. Measurements were performed in the neon weakly magnetized dc plasma using the radial movable cylindrical Langmuire probe. From probe characteristics, radial dependences of plasma parameters (plasma potential, floating potential, electron density) were obtained. Optical emission spectroscopy accompanied with a method of effective branching fractions (EBF) was used to determine neon 1s3 and 1s5 metastable state densities from transitions 2p5 3p - 2p5 3s. The determined density of 1s5 metastable state was 2.2x10^10 cm-3.
dcterms:title
Langmuir Probe and Optical Emission Diagnostics of DC Cylindrical Magnetron Langmuir Probe and Optical Emission Diagnostics of DC Cylindrical Magnetron
skos:prefLabel
Langmuir Probe and Optical Emission Diagnostics of DC Cylindrical Magnetron Langmuir Probe and Optical Emission Diagnostics of DC Cylindrical Magnetron
skos:notation
RIV/00216224:14310/12:00057404!RIV13-GA0-14310___
n12:predkladatel
n13:orjk%3A14310
n3:aktivita
n14:I n14:S n14:P
n3:aktivity
I, P(GD104/09/H080), S
n3:dodaniDat
n6:2013
n3:domaciTvurceVysledku
n7:4701089 n7:9725202
n3:druhVysledku
n15:O
n3:duvernostUdaju
n4:S
n3:entitaPredkladatele
n10:predkladatel
n3:idSjednocenehoVysledku
146398
n3:idVysledku
RIV/00216224:14310/12:00057404
n3:jazykVysledku
n9:eng
n3:klicovaSlova
magnetron; Langmuir probe; optical emission spectroscopy; neon; metastable state atom densities
n3:klicoveSlovo
n5:neon n5:metastable%20state%20atom%20densities n5:Langmuir%20probe n5:optical%20emission%20spectroscopy n5:magnetron
n3:kontrolniKodProRIV
[533C901C92DE]
n3:obor
n16:BL
n3:pocetDomacichTvurcuVysledku
2
n3:pocetTvurcuVysledku
5
n3:projekt
n17:GD104%2F09%2FH080
n3:rokUplatneniVysledku
n6:2012
n3:tvurceVysledku
Kudrna, Pavel Dosoudilová, Lenka Navrátil, Zdeněk Kolpaková, Anna Tichý, Milan
n18:organizacniJednotka
14310