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Namespace Prefixes

PrefixIRI
dctermshttp://purl.org/dc/terms/
n9http://localhost/temp/predkladatel/
n12http://linked.opendata.cz/resource/domain/vavai/projekt/
n4http://linked.opendata.cz/resource/domain/vavai/riv/tvurce/
n15http://linked.opendata.cz/resource/domain/vavai/subjekt/
n19http://linked.opendata.cz/resource/domain/vavai/vysledek/RIV%2F00216224%3A14310%2F12%3A00057155%21RIV13-AV0-14310___/
n14http://linked.opendata.cz/ontology/domain/vavai/
shttp://schema.org/
rdfshttp://www.w3.org/2000/01/rdf-schema#
skoshttp://www.w3.org/2004/02/skos/core#
n3http://linked.opendata.cz/ontology/domain/vavai/riv/
n2http://linked.opendata.cz/resource/domain/vavai/vysledek/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
n5http://linked.opendata.cz/ontology/domain/vavai/riv/klicoveSlovo/
n16http://linked.opendata.cz/ontology/domain/vavai/riv/duvernostUdaju/
xsdhhttp://www.w3.org/2001/XMLSchema#
n20http://linked.opendata.cz/ontology/domain/vavai/riv/aktivita/
n7http://linked.opendata.cz/ontology/domain/vavai/riv/jazykVysledku/
n18http://linked.opendata.cz/ontology/domain/vavai/riv/druhVysledku/
n17http://linked.opendata.cz/ontology/domain/vavai/riv/obor/
n8http://reference.data.gov.uk/id/gregorian-year/

Statements

Subject Item
n2:RIV%2F00216224%3A14310%2F12%3A00057155%21RIV13-AV0-14310___
rdf:type
skos:Concept n14:Vysledek
rdfs:seeAlso
http://www.chemicke-listy.cz/common/content-issue_s5-volume_106-year_2012.html
dcterms:description
The aim of this work was to prepare a set of DLC films from different mixtures of precursor gases (methane, hydrogen, deuterium, nitrogen and/or HMDSO) using RFPECVD on substrates such as crystalline silicon, glass, and steel. The prepared films were characterized by several diagnostic tools and the properties of hydrogenated amorphous carbon films and the modified diamond-like carbon thin films with different admixtures (N, Si, O, D) were compared. Mechanical tests were performed on the obtained films mainly using depth sensing indentation method. We focused our attention on the following coating properties: hardness, elastic modulus, fracture toughness, film-substrate adhesion. Additionally, the effect of the internal stress on the indentation response of the filmsubstrate systems was studied. The tribological properties of the films were also investigated. The surface free energy of the films was performed by contact angle measuring technique. The aim of this work was to prepare a set of DLC films from different mixtures of precursor gases (methane, hydrogen, deuterium, nitrogen and/or HMDSO) using RFPECVD on substrates such as crystalline silicon, glass, and steel. The prepared films were characterized by several diagnostic tools and the properties of hydrogenated amorphous carbon films and the modified diamond-like carbon thin films with different admixtures (N, Si, O, D) were compared. Mechanical tests were performed on the obtained films mainly using depth sensing indentation method. We focused our attention on the following coating properties: hardness, elastic modulus, fracture toughness, film-substrate adhesion. Additionally, the effect of the internal stress on the indentation response of the filmsubstrate systems was studied. The tribological properties of the films were also investigated. The surface free energy of the films was performed by contact angle measuring technique.
dcterms:title
PROPERTIES OF MODIFIED AMORPHOUS CARBON THIN FILMS DEPOSITED BY PECVD PROPERTIES OF MODIFIED AMORPHOUS CARBON THIN FILMS DEPOSITED BY PECVD
skos:prefLabel
PROPERTIES OF MODIFIED AMORPHOUS CARBON THIN FILMS DEPOSITED BY PECVD PROPERTIES OF MODIFIED AMORPHOUS CARBON THIN FILMS DEPOSITED BY PECVD
skos:notation
RIV/00216224:14310/12:00057155!RIV13-AV0-14310___
n14:predkladatel
n15:orjk%3A14310
n3:aktivita
n20:S n20:P
n3:aktivity
P(ED2.1.00/03.0086), P(FT-TA5/114), P(GA202/07/1669), P(KAN311610701), S
n3:cisloPeriodika
106
n3:dodaniDat
n8:2013
n3:domaciTvurceVysledku
n4:5823803 n4:9679588 n4:5132835 n4:7719043 n4:6418880
n3:druhVysledku
n18:J
n3:duvernostUdaju
n16:S
n3:entitaPredkladatele
n19:predkladatel
n3:idSjednocenehoVysledku
162894
n3:idVysledku
RIV/00216224:14310/12:00057155
n3:jazykVysledku
n7:eng
n3:klicovaSlova
RF-PECVD; amorphous carbon; protective coatings; DLC
n3:klicoveSlovo
n5:amorphous%20carbon n5:DLC n5:protective%20coatings n5:RF-PECVD
n3:kodStatuVydavatele
CZ - Česká republika
n3:kontrolniKodProRIV
[61A6F53281CB]
n3:nazevZdroje
Chem. listy
n3:obor
n17:BL
n3:pocetDomacichTvurcuVysledku
5
n3:pocetTvurcuVysledku
5
n3:projekt
n12:ED2.1.00%2F03.0086 n12:FT-TA5%2F114 n12:GA202%2F07%2F1669 n12:KAN311610701
n3:rokUplatneniVysledku
n8:2012
n3:svazekPeriodika
106/2012
n3:tvurceVysledku
Čupera, Jan Buršíková, Vilma Stoica, Adrian Mocanu, Valentin Kelar, Lukáš
s:issn
0009-2770
s:numberOfPages
5
n9:organizacniJednotka
14310