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Statements

Subject Item
n2:RIV%2F00216224%3A14310%2F11%3A00051581%21RIV12-MSM-14310___
rdf:type
n7:Vysledek skos:Concept
dcterms:description
Accurate spectroellipsometric (SE) measurements in the rotating analyzer (RAE) or rotating polarizer (RPE) configurations require accurate values of the polarizer/analyzer(/retarder) azimuths. Accurate spectroellipsometric (SE) measurements in the rotating analyzer (RAE) or rotating polarizer (RPE) configurations require accurate values of the polarizer/analyzer(/retarder) azimuths. While the readings are usually fairly accurate, true values are influenced by possible offsets between the plane of incidence, physical axes of the elements, and the instrument scales. The offsets are often determined by specialized calibration procedures. We describe SE measurements designed to obtain the calibration parameters together with the target ellipsometric spectra. We use multiple settings of the polarizer (analyzer) azimuths in RAE (RPE), respectively, to optimize precision and accuracy of SE measurements, and to economize measurement time. Accurate spectroellipsometric (SE) measurements in the rotating analyzer (RAE) or rotating polarizer (RPE) configurations require accurate values of the polarizer/analyzer(/retarder) azimuths. Accurate spectroellipsometric (SE) measurements in the rotating analyzer (RAE) or rotating polarizer (RPE) configurations require accurate values of the polarizer/analyzer(/retarder) azimuths. While the readings are usually fairly accurate, true values are influenced by possible offsets between the plane of incidence, physical axes of the elements, and the instrument scales. The offsets are often determined by specialized calibration procedures. We describe SE measurements designed to obtain the calibration parameters together with the target ellipsometric spectra. We use multiple settings of the polarizer (analyzer) azimuths in RAE (RPE), respectively, to optimize precision and accuracy of SE measurements, and to economize measurement time.
dcterms:title
Optimized calibration and measurement procedures in rotating analyzer and rotating polarizer ellipsometry Optimized calibration and measurement procedures in rotating analyzer and rotating polarizer ellipsometry
skos:prefLabel
Optimized calibration and measurement procedures in rotating analyzer and rotating polarizer ellipsometry Optimized calibration and measurement procedures in rotating analyzer and rotating polarizer ellipsometry
skos:notation
RIV/00216224:14310/11:00051581!RIV12-MSM-14310___
n7:predkladatel
n8:orjk%3A14310
n3:aktivita
n9:Z n9:S
n3:aktivity
S, Z(MSM0021622410)
n3:cisloPeriodika
9
n3:dodaniDat
n5:2012
n3:domaciTvurceVysledku
n13:1834282 n13:8635390
n3:druhVysledku
n20:J
n3:duvernostUdaju
n4:S
n3:entitaPredkladatele
n18:predkladatel
n3:idSjednocenehoVysledku
218784
n3:idVysledku
RIV/00216224:14310/11:00051581
n3:jazykVysledku
n15:eng
n3:klicovaSlova
ellipsometry: spectroscopic; analyzer: rotating
n3:klicoveSlovo
n12:ellipsometry%3A%20spectroscopic n12:analyzer%3A%20rotating
n3:kodStatuVydavatele
CZ - Česká republika
n3:kontrolniKodProRIV
[A6D3DF0BB392]
n3:nazevZdroje
Thin Solid Films
n3:obor
n19:BM
n3:pocetDomacichTvurcuVysledku
2
n3:pocetTvurcuVysledku
3
n3:rokUplatneniVysledku
n5:2011
n3:svazekPeriodika
519
n3:tvurceVysledku
Münz, Filip Maršík, Přemysl Humlíček, Josef
n3:wos
000289174200029
n3:zamer
n17:MSM0021622410
s:issn
0040-6090
s:numberOfPages
4
n6:doi
10.1016/j.tsf.2010.12.063
n16:organizacniJednotka
14310