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Statements

Subject Item
n2:RIV%2F00216224%3A14310%2F11%3A00050061%21RIV12-GA0-14310___
rdf:type
n8:Vysledek skos:Concept
dcterms:description
Interesting properties of diamond-like carbon (DLC) coatings such as high hardness, low friction coefficient, high thermal conductivity and wide band gaps have increased the number of industrial partners to research ways of producing DLC layers with chemical inertness, high gas barrier properties and high biocompatibility. The aim of the experiments was to characterize and compare the properties of diamond-like carbon films prepared from different mixtures such as CH4/H2, CH4/H2/N2 and CH4/Ar from a radiofrequency capacitively-coupled discharge at 13.56 MHz. Parameters like concentration, pressure, power and time were changed to vary film properties. The films were optically characterized by UV-VIS reflectometry, ellipsometry. Layer composition was investigated by FTIR transmittance and Rutherford backscattering spectrometry (RBS) in combination with elastic recoil detection analysis (ERDA). The mechanical properties were assessed by depth-sensing indentation (DSI). Interesting properties of diamond-like carbon (DLC) coatings such as high hardness, low friction coefficient, high thermal conductivity and wide band gaps have increased the number of industrial partners to research ways of producing DLC layers with chemical inertness, high gas barrier properties and high biocompatibility. The aim of the experiments was to characterize and compare the properties of diamond-like carbon films prepared from different mixtures such as CH4/H2, CH4/H2/N2 and CH4/Ar from a radiofrequency capacitively-coupled discharge at 13.56 MHz. Parameters like concentration, pressure, power and time were changed to vary film properties. The films were optically characterized by UV-VIS reflectometry, ellipsometry. Layer composition was investigated by FTIR transmittance and Rutherford backscattering spectrometry (RBS) in combination with elastic recoil detection analysis (ERDA). The mechanical properties were assessed by depth-sensing indentation (DSI).
dcterms:title
INFLUENCE OF PLASMA DEPOSITION PARAMETERS ON INCORPORATION OF HYDROGEN OR NITROGEN INTO DLC INFLUENCE OF PLASMA DEPOSITION PARAMETERS ON INCORPORATION OF HYDROGEN OR NITROGEN INTO DLC
skos:prefLabel
INFLUENCE OF PLASMA DEPOSITION PARAMETERS ON INCORPORATION OF HYDROGEN OR NITROGEN INTO DLC INFLUENCE OF PLASMA DEPOSITION PARAMETERS ON INCORPORATION OF HYDROGEN OR NITROGEN INTO DLC
skos:notation
RIV/00216224:14310/11:00050061!RIV12-GA0-14310___
n8:predkladatel
n15:orjk%3A14310
n3:aktivita
n4:Z n4:P
n3:aktivity
P(GD104/09/H080), Z(MSM0021622411)
n3:dodaniDat
n7:2012
n3:domaciTvurceVysledku
Muresan, Mihai George n14:9412921 n14:4205448 n14:5823803 n14:9699414 n14:5870879
n3:druhVysledku
n17:O
n3:duvernostUdaju
n19:S
n3:entitaPredkladatele
n12:predkladatel
n3:idSjednocenehoVysledku
204519
n3:idVysledku
RIV/00216224:14310/11:00050061
n3:jazykVysledku
n11:eng
n3:klicovaSlova
Diamond-like carbon; Amorphous hydrogenated carbon; Optical properties; Nitrogen
n3:klicoveSlovo
n5:Amorphous%20hydrogenated%20carbon n5:Diamond-like%20carbon n5:Nitrogen n5:Optical%20properties
n3:kontrolniKodProRIV
[7B4D15791EB1]
n3:obor
n18:BL
n3:pocetDomacichTvurcuVysledku
6
n3:pocetTvurcuVysledku
7
n3:projekt
n6:GD104%2F09%2FH080
n3:rokUplatneniVysledku
n7:2011
n3:tvurceVysledku
Mikšová, Romana Buršíková, Vilma Peřina, Vratislav Franta, Daniel Zajíčková, Lenka Muresan, Mihai George Nečas, David
n3:zamer
n16:MSM0021622411
n9:organizacniJednotka
14310