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Namespace Prefixes

PrefixIRI
dctermshttp://purl.org/dc/terms/
n11http://localhost/temp/predkladatel/
n5http://linked.opendata.cz/resource/domain/vavai/riv/tvurce/
n4http://linked.opendata.cz/resource/domain/vavai/projekt/
n14http://linked.opendata.cz/resource/domain/vavai/vysledek/RIV%2F00216224%3A14310%2F10%3A00047539%21RIV11-GA0-14310___/
n7http://linked.opendata.cz/ontology/domain/vavai/
n9http://linked.opendata.cz/resource/domain/vavai/zamer/
skoshttp://www.w3.org/2004/02/skos/core#
n3http://linked.opendata.cz/ontology/domain/vavai/riv/
n2http://linked.opendata.cz/resource/domain/vavai/vysledek/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
n12http://linked.opendata.cz/ontology/domain/vavai/riv/klicoveSlovo/
n16http://linked.opendata.cz/ontology/domain/vavai/riv/duvernostUdaju/
xsdhhttp://www.w3.org/2001/XMLSchema#
n18http://linked.opendata.cz/ontology/domain/vavai/riv/jazykVysledku/
n10http://linked.opendata.cz/ontology/domain/vavai/riv/aktivita/
n17http://linked.opendata.cz/ontology/domain/vavai/riv/obor/
n15http://linked.opendata.cz/ontology/domain/vavai/riv/druhVysledku/
n13http://reference.data.gov.uk/id/gregorian-year/

Statements

Subject Item
n2:RIV%2F00216224%3A14310%2F10%3A00047539%21RIV11-GA0-14310___
rdf:type
n7:Vysledek skos:Concept
dcterms:description
Diamond-like carbon (amorphous hydrogenated carbon: a-C:H) films doped with different amount of nitrogen were deposited by plasma enhanced chemical vapor deposition (PECVD) using capacitively coupled rf discharge 13.56 in the mixture of CH4/H2/N2 on silicon substrates. Nitrogen content allowed reduction of the inherent internal stress of the DLC layer. DC self-bias, time and gas feed composition parameters were used for modification of the optical properties, adhesion to substrates, chemical composition and structure of the deposited films. Diamond-like carbon (amorphous hydrogenated carbon: a-C:H) films doped with different amount of nitrogen were deposited by plasma enhanced chemical vapor deposition (PECVD) using capacitively coupled rf discharge 13.56 in the mixture of CH4/H2/N2 on silicon substrates. Nitrogen content allowed reduction of the inherent internal stress of the DLC layer. DC self-bias, time and gas feed composition parameters were used for modification of the optical properties, adhesion to substrates, chemical composition and structure of the deposited films.
dcterms:title
Effect of Nitrogen Incorporation on Optical Properties of DLC Layers Effect of Nitrogen Incorporation on Optical Properties of DLC Layers
skos:prefLabel
Effect of Nitrogen Incorporation on Optical Properties of DLC Layers Effect of Nitrogen Incorporation on Optical Properties of DLC Layers
skos:notation
RIV/00216224:14310/10:00047539!RIV11-GA0-14310___
n3:aktivita
n10:Z n10:P
n3:aktivity
P(GD104/09/H080), Z(MSM0021622411)
n3:dodaniDat
n13:2011
n3:domaciTvurceVysledku
n5:9412921 Muresan, Mihai George n5:4205448 n5:5870879
n3:druhVysledku
n15:O
n3:duvernostUdaju
n16:S
n3:entitaPredkladatele
n14:predkladatel
n3:idSjednocenehoVysledku
256081
n3:idVysledku
RIV/00216224:14310/10:00047539
n3:jazykVysledku
n18:eng
n3:klicovaSlova
Diamond-Like Carbon; optical properties
n3:klicoveSlovo
n12:optical%20properties n12:Diamond-Like%20Carbon
n3:kontrolniKodProRIV
[74B892552C39]
n3:obor
n17:BL
n3:pocetDomacichTvurcuVysledku
4
n3:pocetTvurcuVysledku
4
n3:projekt
n4:GD104%2F09%2FH080
n3:rokUplatneniVysledku
n13:2010
n3:tvurceVysledku
Nečas, David Zajíčková, Lenka Muresan, Mihai George Franta, Daniel
n3:zamer
n9:MSM0021622411
n11:organizacniJednotka
14310