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Statements

Subject Item
n2:RIV%2F00216224%3A14310%2F10%3A00040642%21RIV11-GA0-14310___
rdf:type
skos:Concept n16:Vysledek
dcterms:description
A novel method of determination of electron temperature and electron density in plasma based on optical emission spectroscopy and collisional-radiative modelling was compared with Langmuir probe measurement and PIC/MC simulation. An RF(13.56 MHz) capacitively-coupled discharge in neon at 10 Pa was investigated by intensity-calibrated optical emission spectroscopy. The intensities of neon transitions between 3s-3p states were fitted with CR model to determine the electron temperature and density. Metastable density measured in absorption was used in the calculations. A good agreement between electron temperature measured by OES+CR method and PIC/MC simulation was obtained close to driven electrode. The decrease of the electron temperature going into the bulk plasma, as expected from PIC/MC simulation, was not observed in experiment. Electron density determined from the fit of absolute intensities was found to be 5$\times$ larger than the result of Langmuir probe measurement. A novel method of determination of electron temperature and electron density in plasma based on optical emission spectroscopy and collisional-radiative modelling was compared with Langmuir probe measurement and PIC/MC simulation. An RF(13.56 MHz) capacitively-coupled discharge in neon at 10 Pa was investigated by intensity-calibrated optical emission spectroscopy. The intensities of neon transitions between 3s-3p states were fitted with CR model to determine the electron temperature and density. Metastable density measured in absorption was used in the calculations. A good agreement between electron temperature measured by OES+CR method and PIC/MC simulation was obtained close to driven electrode. The decrease of the electron temperature going into the bulk plasma, as expected from PIC/MC simulation, was not observed in experiment. Electron density determined from the fit of absolute intensities was found to be 5$\times$ larger than the result of Langmuir probe measurement.
dcterms:title
Comparative Study of RF Discharge in Neon by OES, Langmuir Probe, CR and PIC/MC Modelling Comparative Study of RF Discharge in Neon by OES, Langmuir Probe, CR and PIC/MC Modelling
skos:prefLabel
Comparative Study of RF Discharge in Neon by OES, Langmuir Probe, CR and PIC/MC Modelling Comparative Study of RF Discharge in Neon by OES, Langmuir Probe, CR and PIC/MC Modelling
skos:notation
RIV/00216224:14310/10:00040642!RIV11-GA0-14310___
n5:aktivita
n15:S n15:P n15:Z
n5:aktivity
P(GA202/09/0800), P(KAN101630651), S, Z(MSM0021622411)
n5:dodaniDat
n10:2011
n5:domaciTvurceVysledku
n6:1034871 n6:4701089 n6:6296556
n5:druhVysledku
n14:O
n5:duvernostUdaju
n17:S
n5:entitaPredkladatele
n18:predkladatel
n5:idSjednocenehoVysledku
251338
n5:idVysledku
RIV/00216224:14310/10:00040642
n5:jazykVysledku
n13:eng
n5:klicovaSlova
optical emission spectroscopy; collisional-radiative model; RF discharge; neon
n5:klicoveSlovo
n7:neon n7:RF%20discharge n7:collisional-radiative%20model n7:optical%20emission%20spectroscopy
n5:kontrolniKodProRIV
[615CC6EE6105]
n5:obor
n9:BL
n5:pocetDomacichTvurcuVysledku
3
n5:pocetTvurcuVysledku
4
n5:projekt
n11:GA202%2F09%2F0800 n11:KAN101630651
n5:rokUplatneniVysledku
n10:2010
n5:tvurceVysledku
Trunec, David Navrátil, Zdeněk Brzobohatý, Oto Dvořák, Pavel
n5:zamer
n8:MSM0021622411
n12:organizacniJednotka
14310