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Statements

Subject Item
n2:RIV%2F00216224%3A14310%2F10%3A00040567%21RIV11-MSM-14310___
rdf:type
skos:Concept n19:Vysledek
dcterms:description
The contribution focuses on the plasma treatment of crystalline silicon surface. The plasma was generated by Diffuse Coplanar Surface Barrier Discharge (DCSBD) at atmospheric pressure in an ambient air. By means of the contact angle measurements surface free energy was studied an by atomic force microscope (AFM) the surface roughness of silicon before and after plasma treatment was investigated. The contribution focuses on the plasma treatment of crystalline silicon surface. The plasma was generated by Diffuse Coplanar Surface Barrier Discharge (DCSBD) at atmospheric pressure in an ambient air. By means of the contact angle measurements surface free energy was studied an by atomic force microscope (AFM) the surface roughness of silicon before and after plasma treatment was investigated.
dcterms:title
Plasma treatment of silicon surface Plasma treatment of silicon surface
skos:prefLabel
Plasma treatment of silicon surface Plasma treatment of silicon surface
skos:notation
RIV/00216224:14310/10:00040567!RIV11-MSM-14310___
n3:aktivita
n9:Z n9:O n9:P
n3:aktivity
O, P(KAN101630651), Z(MSM0021622411)
n3:dodaniDat
n13:2011
n3:domaciTvurceVysledku
n6:6760880 n6:1462202 n6:7217617 n6:1879405
n3:druhVysledku
n17:D
n3:duvernostUdaju
n8:S
n3:entitaPredkladatele
n20:predkladatel
n3:idSjednocenehoVysledku
279130
n3:idVysledku
RIV/00216224:14310/10:00040567
n3:jazykVysledku
n12:eng
n3:klicovaSlova
silicon surface - dielectric barrier discharge - plasma treatment
n3:klicoveSlovo
n14:silicon%20surface
n3:kontrolniKodProRIV
[9B6BCA8C5320]
n3:mistoKonaniAkce
Plzeň
n3:mistoVydani
Plzeň
n3:nazevZdroje
Potential and Applications of Thin Ceramic and Metal Coatings
n3:obor
n5:BL
n3:pocetDomacichTvurcuVysledku
4
n3:pocetTvurcuVysledku
4
n3:projekt
n11:KAN101630651
n3:rokUplatneniVysledku
n13:2010
n3:tvurceVysledku
Haničinec, Martin Sťahel, Pavel Skácelová, Dana Černák, Mirko
n3:typAkce
n18:EUR
n3:zahajeniAkce
2010-05-26+02:00
n3:zamer
n21:MSM0021622411
s:numberOfPages
2
n16:hasPublisher
Západočeská univerzita v Plzni
n22:isbn
978-80-7043-894-7
n10:organizacniJednotka
14310