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Statements

Subject Item
n2:RIV%2F00216224%3A14310%2F08%3A00025835%21RIV11-MSM-14310___
rdf:type
n9:Vysledek skos:Concept
dcterms:description
We discuss optimized extraction of information contained in a series of complex reflectance ratios in a series of consecutive, in-situ SE measurements during the growth of thin films. We present a general computational scheme and discuss guidelines for the optimum data treatment. As an example, we analyze several hundreds of spectra recorded during the growth of diamond-like carbon on TiCN/steel substrate. We discuss optimized extraction of information contained in a series of complex reflectance ratios in a series of consecutive, in-situ SE measurements during the growth of thin films. We present a general computational scheme and discuss guidelines for the optimum data treatment. As an example, we analyze several hundreds of spectra recorded during the growth of diamond-like carbon on TiCN/steel substrate.
dcterms:title
In-situ spectroscopic ellipsometry: optimization of monitoring and closed-loop-control procedures In-situ spectroscopic ellipsometry: optimization of monitoring and closed-loop-control procedures
skos:prefLabel
In-situ spectroscopic ellipsometry: optimization of monitoring and closed-loop-control procedures In-situ spectroscopic ellipsometry: optimization of monitoring and closed-loop-control procedures
skos:notation
RIV/00216224:14310/08:00025835!RIV11-MSM-14310___
n4:aktivita
n10:Z
n4:aktivity
Z(MSM0021622410)
n4:cisloPeriodika
4
n4:dodaniDat
n6:2011
n4:domaciTvurceVysledku
n12:1834282
n4:druhVysledku
n5:J
n4:duvernostUdaju
n17:S
n4:entitaPredkladatele
n16:predkladatel
n4:idSjednocenehoVysledku
372603
n4:idVysledku
RIV/00216224:14310/08:00025835
n4:jazykVysledku
n18:eng
n4:klicovaSlova
in situ ellipsometry; monitoring; closed loop control
n4:klicoveSlovo
n8:closed%20loop%20control n8:monitoring n8:in%20situ%20ellipsometry
n4:kodStatuVydavatele
DE - Spolková republika Německo
n4:kontrolniKodProRIV
[FDB9DA73187E]
n4:nazevZdroje
physica status solidi (a), Applied research
n4:obor
n14:BM
n4:pocetDomacichTvurcuVysledku
1
n4:pocetTvurcuVysledku
1
n4:rokUplatneniVysledku
n6:2008
n4:svazekPeriodika
205
n4:tvurceVysledku
Humlíček, Josef
n4:wos
000255702600018
n4:zamer
n13:MSM0021622410
s:issn
1862-6300
s:numberOfPages
4
n15:organizacniJednotka
14310